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Keywords: microfabrication
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Journal Articles
C. J. Teo, L. X. Liu, H. Q. Li, L. C. Ho, S. A. Jacobson, F. F. Ehrich, A. H. Epstein, Z. S. Spakovszky
Journal:
Journal of Tribology
Article Type: Research Papers
J. Tribol. July 2009, 131(3): 032001.
Published Online: May 27, 2009
... 15 04 2006 27 02 2009 27 05 2009 elasticity gas turbines machine bearings microfabrication micromechanical devices rotors Several years ago, a multidisciplinary program was initiated at the MIT with the goal to develop high-speed rotating power micro-electro-mechanical...
