Topics: Deformation, Micromachining, Residual stresses, Cantilevers, Compression, Stress, Buckling, Thin films

Topics: Acoustics, Dynamic response, Hammers, Microelectromechanical systems, Ultrasonic transducers, Waves, Damping, Excitation, Microbeams, Mode shapes

Topics: Actuators, Design, Electrostatic actuators, Microelectromechanical systems, Vibration equipment

Topics: Microelectromechanical systems, Poisson ratio, Resonance, Thin films, Cantilevers, Micromachining, Silicon, Errors, Film thickness, Vibration

Topics: Mirrors, Micromachining, Thin films, Inertia (Mechanics), Residual stresses, Stiffness, Stress, Deformation, Design

Topics: Actuators, Levers, Electrodes

Topics: Aluminum, Instrumentation, Tensile testing, Testing, Microelectromechanical systems, Stress, Thin films, Actuators, Manufacturing, Young's modulus

Topics: Composite materials, Dynamic response, Hammers, Ultrasonic transducers

Topics: Crystals, Self-assembly, Silicon-on-insulator, Semiconductor wafers, Thin films, Accelerated life testing, Microactuators, Microelectromechanical systems, Mirrors, Optical instruments

Topics: Actuators, Crystals, Degrees of freedom, Grippers, Manipulators, Manufacturing, Mechanical properties, Micromachining, Robots, Silicon

Topics: Acoustics, Design, Manufacturing, Thin films, Etching, Waves

Topics: Actuators, Design, Disks, Electrodes, Electrostatic actuators, Laser beams, Lenses (Optics), Micromachining, Pistons, Self-assembly