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Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul Lema Galindo, Paras Ajay, S V Sreenivasan

J. Micro Nano-Manuf.

Paper No: JMNM-22-1035

DOI: https://doi.org/10.1115/1.4062167

Published Online: March 21, 2023

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Topics: Etching, Manufacturing, Metals, Nanoscale phenomena, Silicon, Plasma etching, Nanowires, Flow (Dynamics), Hardware, Microscale devices

Journal Articles

Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns

Ramin Sabbagh, Alec Stothert, S. V. Sreenivasan, Dragan Djurdjanovic

J. Manuf. Sci. Eng. June 2023, 145(6): 061010.

Paper No: MANU-22-1619

DOI: https://doi.org/10.1115/1.4056923

Published Online: March 14, 2023

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Topics: Dimensions, Gages, Inspection, Inverse problems, Metrology, Reflectance, Semiconductor wafers, Spectra (Spectroscopy), Optimization, Simulation

Journal Articles

Metal Assisted Chemical Etch of Polycrystalline Silicon

Crystal Barrera, Paras Ajay, Akhila Mallavarapu, Mark Hrdy, S. V. Sreenivasan

J. Micro Nano-Manuf. June 2022, 10(2): 021002.

Paper No: JMNM-22-1020

DOI: https://doi.org/10.1115/1.4055401

Published Online: September 27, 2022

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Topics: Polysilicon, Metals, Columns (Structural), Etching, Silicon

Proceedings Papers

A Procedure to Determine Equilibrium Postural Configurations for Arbitrary Locations of the Feet

L. Javier Gonzalez, S. V. Sreenivasan

Proc. ASME. IMECE97, Advances in Bioengineering, 353-354, November 16–21, 1997

Paper No: IMECE1997-0369

DOI: https://doi.org/10.1115/IMECE1997-0369

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Topics: Equilibrium (Physics), Machinery, Rehabilitation devices, Robotics

Proceedings Papers

A Drift-Free Navigation System for a Mobile Robotic Vehicle Operating on Unstructured Terrain

S. V. Sreenivasan, Kenneth J. Waldron

Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 413-422, September 13–16, 1992

Paper No: DETC1992-0241

DOI: https://doi.org/10.1115/DETC1992-0241

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Topics: Navigation, Robotic vehicles, Vehicles, Degrees of freedom, Errors, Robotics

Proceedings Papers

Solution of the Direct Position Kinematics Problem of the General Stewart Platform Using Advanced Polynomial Continuation

S. V. Sreenivasan, Prabjot Nanua

Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 99-106, September 13–16, 1992

Paper No: DETC1992-0203

DOI: https://doi.org/10.1115/DETC1992-0203

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Topics: Kinematics, Polynomials, Algorithms, Geometry

Proceedings Papers

A Study of the Position Problem for Multi-Circuit Mechanisms

Kenneth J. Waldron, S. V. Sreenivasan

Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Mechanism Synthesis and Analysis, 337-348, September 11–14, 1994

Paper No: DETC1994-0212

DOI: https://doi.org/10.1115/DETC1994-0212

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Topics: Circuits, Errors, Kinematics

Proceedings Papers

Globally Optimal Force Allocation in Active Mechanisms With Four Frictional Contacts

S. V. Sreenivasan, K. J. Waldron, S. Mukherjee

Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Robotics — Kinematics, Dynamics and Controls, 63-72, September 11–14, 1994

Paper No: DETC1994-0307

DOI: https://doi.org/10.1115/DETC1994-0307

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Topics: Algorithms, Control equipment, Degrees of freedom, Grippers, Optimization, Performance characterization, Polynomials, Redundancy (Engineering), Vehicles

Proceedings Papers

Displacement Analysis of an Articulated Wheeled Vehicle Configuration on Uneven Terrain

S. V. Sreenivasan, K. J. Waldron

Proc. ASME. DETC94, 23rd Biennial Mechanisms Conference: Robotics — Kinematics, Dynamics and Controls, 393-402, September 11–14, 1994

Paper No: DETC1994-0348

DOI: https://doi.org/10.1115/DETC1994-0348

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Topics: Displacement, Vehicles, Chain, Polynomials, Geometry, Kinematics, Mechanical admittance, Stability

Journal Articles

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Brian Gawlik, Ariel R. Barr, Akhila Mallavarapu, Edward T. Yu, S. V. Sreenivasan

J. Micro Nano-Manuf. March 2021, 9(1): 010904.

Paper No: JMNM-20-1008

DOI: https://doi.org/10.1115/1.4049959

Published Online: February 26, 2021

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Topics: Computers, Delays, Etching, Flaw detection, Glass, Imaging, Manufacturing, Particulate matter, Root cause analysis, Semiconductor wafers

Proceedings Papers

Force Distribution Characteristics of Actively Reconfigurable Wheeled Vehicle Systems

S. V. Sreenivasan, P. Nanua

Proc. ASME. DETC-CIE96, Volume 2B: 24th Biennial Mechanisms Conference, V02BT02A022, August 18–22, 1996

Paper No: 96-DETC/MECH-1138

DOI: https://doi.org/10.1115/96-DETC/MECH-1138

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Topics: Vehicles, Kinematics, Mathematics, Mobile robots, Motion control, Space

Proceedings Papers

Kinematic Geometry of Wheeled Vehicle Systems

S. V. Sreenivasan, P. Nanua

Proc. ASME. DETC-CIE96, Volume 2B: 24th Biennial Mechanisms Conference, V02BT02A021, August 18–22, 1996

Paper No: 96-DETC/MECH-1137

DOI: https://doi.org/10.1115/96-DETC/MECH-1137

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Topics: Geometry, Kinematics, Vehicles, Closed kinematic chains, Design, Mechanical admittance, Screws, Systems theory

Proceedings Papers

Kinematics of Two Wheels Joined by a Variable-Length Axle on Uneven Terrain

P. W. Davis, S. V. Sreenivasan, B. J. Choi

Proc. ASME. DETC97, Volume 2: 23rd Design Automation Conference, V002T29A078, September 14–17, 1997

Paper No: DETC97/DAC-3857

DOI: https://doi.org/10.1115/DETC97/DAC-3857

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Topics: Kinematics, Vehicles, Wheels

Proceedings Papers

Partial Contact Force Controllability in Active Wheeled Vehicles

B. J. Choi, S. V. Sreenivasan

Proc. ASME. DETC98, Volume 1A: 25th Biennial Mechanisms Conference, V01AT01A011, September 13–16, 1998

Paper No: DETC98/MECH-5980

DOI: https://doi.org/10.1115/DETC98/MECH-5980

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Topics: Vehicles

Proceedings Papers

Design of a Tele-Robotic System for the Maintenance of Boiler Hoppers in Electric Power Plants

Kamel S. Saidi, Jongwon Seo, S. V. Sreenivasan, Carl T. Haas, Alfred E. Traver

Proc. ASME. DETC98, Volume 1B: 25th Biennial Mechanisms Conference, V01BT01A017, September 13–16, 1998

Paper No: DETC98/MECH-5998

DOI: https://doi.org/10.1115/DETC98/MECH-5998

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Topics: Boilers, Design, Electricity (Physics), Maintenance, Robotics, Cement clinkers, Poles (Building), Robots, Damage, Doors

Proceedings Papers

Feasible Contact Forces in Semi-Active Vehicles

S. V. Sreenivasan, B. J. Choi

Proc. ASME. DETC99, Volume 1: 25th Design Automation Conference, 1481-1490, September 12–16, 1999

Paper No: DETC99/DAC-8673

DOI: https://doi.org/10.1115/DETC99/DAC-8673

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Topics: Vehicles, Actuators, Biomechanics, Kinematics, Mechanical admittance, Screws, Springs

Proceedings Papers

Partially Constrained Compliant Stages for High Resolution Imprint Lithography

B. J. Choi, S. Johnson, S. V. Sreenivasan, M. Colburn, T. Bailey, C. G. Willson

Proc. ASME. IDETC-CIE2000, Volume 7B: 26th Biennial Mechanisms and Robotics Conference, 861-870, September 10–13, 2000

Paper No: DETC2000/MECH-14145

DOI: https://doi.org/10.1115/DETC2000/MECH-14145

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Topics: Lithography, Resolution (Optics), Design, Errors, Kinematics, Machinery, Optics, Photolithography, Separation (Technology), Shear (Mechanics)

Journal Articles

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Shrawan Singhal, Michelle A. Grigas, S. V. Sreenivasan

J. Micro Nano-Manuf. September 2016, 4(3): 031004.

Paper No: JMNM-16-1008

DOI: https://doi.org/10.1115/1.4033742

Published Online: July 1, 2016

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Topics: Particulate matter, Contamination, Nanofabrication, Film thickness, Deformation, Nanoscale phenomena, Nanomanufacturing

Journal Articles

Size-Dependent Nanoparticle Uptake by Endothelial Cells in a Capillary Flow System

Patrick Jurney, Rachit Agarwal, Krishnendu Roy, S. V. Sreenivasan, Li Shi

J. Nanotechnol. Eng. Med. February 2015, 6(1): 011007.

Paper No: NANO-15-1049

DOI: https://doi.org/10.1115/1.4031856

Published Online: November 6, 2015

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Topics: Endothelial cells, Flow (Dynamics), Particulate matter, Shear stress, Nanoparticles, Glass

Journal Articles

Size-Dependent Nanoparticle Margination and Adhesion Propensity in a Microchannel

Patrick Jurney, Rachit Agarwal, Vikramjit Singh, Krishnendu Roy, S. V. Sreenivasan, Li Shi

J. Nanotechnol. Eng. Med. August 2013, 4(3): 031002.

Paper No: NANO-13-1030

DOI: https://doi.org/10.1115/1.4025609

Published Online: November 19, 2013

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Topics: Adhesion, Flow (Dynamics), Nanoparticles, Particulate matter, Microchannels

Journal citation

NARROW

Manuscript

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns

Metal Assisted Chemical Etch of Polycrystalline Silicon

A Procedure to Determine Equilibrium Postural Configurations for Arbitrary Locations of the Feet

A Drift-Free Navigation System for a Mobile Robotic Vehicle Operating on Unstructured Terrain

Solution of the Direct Position Kinematics Problem of the General Stewart Platform Using Advanced Polynomial Continuation

A Study of the Position Problem for Multi-Circuit Mechanisms

Globally Optimal Force Allocation in Active Mechanisms With Four Frictional Contacts

Displacement Analysis of an Articulated Wheeled Vehicle Configuration on Uneven Terrain

Spectral Imaging and Computer Vision for High-Throughput Defect Detection and Root-Cause Analysis of Silicon Nanopillar Arrays

Force Distribution Characteristics of Actively Reconfigurable Wheeled Vehicle Systems

Kinematic Geometry of Wheeled Vehicle Systems

Kinematics of Two Wheels Joined by a Variable-Length Axle on Uneven Terrain

Partial Contact Force Controllability in Active Wheeled Vehicles

Design of a Tele-Robotic System for the Maintenance of Boiler Hoppers in Electric Power Plants

Feasible Contact Forces in Semi-Active Vehicles

Partially Constrained Compliant Stages for High Resolution Imprint Lithography

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Size-Dependent Nanoparticle Uptake by Endothelial Cells in a Capillary Flow System

Size-Dependent Nanoparticle Margination and Adhesion Propensity in a Microchannel

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