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Mohammad Shavezipur
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Proceedings Papers

Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response

Mohammad Shavezipur
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A010, August 14–17, 2022
Paper No: DETC2022-90093
https://doi.org/10.1115/DETC2022-90093
View Paper titled, Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response
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Topics: Capacitance, Design, Membranes, Microelectromechanical systems, Pressure, Pressure sensors, Simulation
Proceedings Papers

Development of a Novel Three-Dimensional Parallel-Plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS)

Negar Rafiee, Brian Huffman, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A001, August 14–17, 2022
Paper No: DETC2022-90378
https://doi.org/10.1115/DETC2022-90378
View Paper titled, Development of a Novel Three-Dimensional Parallel-Plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS)
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Topics: Capacitance, Electrochemical impedance spectroscopy, Phthalate plasticizers, Sensors
Proceedings Papers

Analysis of Capillary Driven Flows Through Open Microchannels for Biosensing Application

Hardikkumar Patel, Terry Yan, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A004, August 17–19, 2021
Paper No: DETC2021-69838
https://doi.org/10.1115/DETC2021-69838
View Paper titled, Analysis of Capillary Driven Flows Through Open Microchannels for Biosensing Application
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Topics: Biosensors, Flow (Dynamics), Fluid dynamics, Food safety, Microchannels
Proceedings Papers

A MEMS Tunable Capacitor With Dual Deformation Modes and High Tunability and Linearity

Mahdi Shahi, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A014, August 17–19, 2021
Paper No: DETC2021-69831
https://doi.org/10.1115/DETC2021-69831
View Paper titled, A MEMS Tunable Capacitor With Dual Deformation Modes and High Tunability and Linearity
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Topics: Capacitors, Deformation, Microelectromechanical systems
Proceedings Papers

Surface Functionalization of Silicon MEMS Biochemical Sensors for the Detection of Foodborne Pathogens

Md Ebrahim Khalil Bhuiyan, Dustin Smith, Eric J. Voss, Chin-Chuan Wei, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A003, August 17–19, 2021
Paper No: DETC2021-69708
https://doi.org/10.1115/DETC2021-69708
View Paper titled, Surface Functionalization of Silicon MEMS Biochemical Sensors for the Detection of Foodborne Pathogens
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Topics: Biosensors, DNA, Microelectromechanical systems, Self-assembly, Sensors, Silicon, Atomic force microscopy, Bacteria, Biological agents, Coating processes
Proceedings Papers

Investigation of the Effect of Native Oxide Layer on Performance of Interdigitated Impedance-Based Silicon Biochemical Sensors

Nadia Ebrahimpour Tolouei, Shima Ghamari, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A003, August 17–19, 2020
Paper No: DETC2020-22207
https://doi.org/10.1115/DETC2020-22207
View Paper titled, Investigation of the Effect of Native Oxide Layer on Performance of Interdigitated Impedance-Based Silicon Biochemical Sensors
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Topics: Sensors, Silicon, Electrodes, Capacitance, Diffusion (Physics), Electrochemical impedance spectroscopy, Coating processes, Coatings, Contamination, Electrochemistry
Proceedings Papers

Development of a MEMS Chemical Sensor for Detection of Phthalates in Juice Using Electrochemical Impedance Spectroscopy

Nadia Ebrahimpour Tolouei, Md Ebrahim Khalil Bhuiyan, Michael Hankins, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A002, August 17–19, 2020
Paper No: DETC2020-22185
https://doi.org/10.1115/DETC2020-22185
View Paper titled, Development of a MEMS Chemical Sensor for Detection of Phthalates in Juice Using Electrochemical Impedance Spectroscopy
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Topics: Electrochemical impedance spectroscopy, Microelectromechanical systems, Phthalate plasticizers, Sensors, Food products, Water, Capacitance, Diffusion (Physics), Dimensions, Electrodes
Proceedings Papers

Linearization of Characteristic Response of a Capacitive MEMS Pressure Sensor by Patterning the Dielectric Layer

Nadia Ebrahimpour Tolouei, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A010, August 17–19, 2020
Paper No: DETC2020-22210
https://doi.org/10.1115/DETC2020-22210
View Paper titled, Linearization of Characteristic Response of a Capacitive MEMS Pressure Sensor by Patterning the Dielectric Layer
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Topics: Microelectromechanical systems, Pressure sensors, Design, Capacitance, Sensors, Electrodes, Pressure, Engineering simulation, Finite element analysis, Shapes
Proceedings Papers

Design and Simulations of a Novel Stiction-Free Laterally Actuated NEM Relay With Flexible Source-Drain Contact

Mehrdad Zandigohar, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A007, August 17–19, 2020
Paper No: DETC2020-22721
https://doi.org/10.1115/DETC2020-22721
View Paper titled, Design and Simulations of a Novel Stiction-Free Laterally Actuated NEM Relay With Flexible Source-Drain Contact
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Topics: Design, Engineering simulation, Simulation, Stiction, Stiffness, Adhesion, Separation (Technology), Finite element analysis, Finite element methods, Finite element model
Proceedings Papers

Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask

Md Ebrahim Khalil Bhuiyan, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2020, Volume 1: 14th International Conference on Micro- and Nanosystems (MNS), V001T01A011, August 17–19, 2020
Paper No: DETC2020-22497
https://doi.org/10.1115/DETC2020-22497
View Paper titled, Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask
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Topics: Pressure sensors, Sensors, Design, Pressure, Capacitance, Membranes, Dimensions, Engineering simulation, Etching, Finite element analysis
Proceedings Papers

Investigation of the Effect of Long-Term Contact on Adhesion Force in Polycrystalline MEMS Devices

Mazen M. Othayq, Nino Giganti, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A007, August 18–21, 2019
Paper No: DETC2019-97839
https://doi.org/10.1115/DETC2019-97839
View Paper titled, Investigation of the Effect of Long-Term Contact on Adhesion Force in Polycrystalline MEMS Devices
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Topics: Adhesion, Microelectromechanical systems, Actuators, Engineering simulation, Finite element methods, Finite element model, Silicon, Simulation
Proceedings Papers

A Capacitive MEMS Pressure Sensor With Wavy Membrane and Linear Capacitance-Pressure Response

Stephen Oke, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A011, August 18–21, 2019
Paper No: DETC2019-98021
https://doi.org/10.1115/DETC2019-98021
View Paper titled, A Capacitive MEMS Pressure Sensor With Wavy Membrane and Linear Capacitance-Pressure Response
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Topics: Capacitance, Membranes, Microelectromechanical systems, Pressure, Pressure sensors, Design, Shapes, Deformation, Electrodes, Cavities
Proceedings Papers

Development of Three-Dimensional MEMS Biochemical Sensors for Low Concentration Aqueous Solutions

Roya Mazrouei, Bryan Kier, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2019, Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- and Nanosystems, V004T08A004, August 18–21, 2019
Paper No: DETC2019-98071
https://doi.org/10.1115/DETC2019-98071
View Paper titled, Development of Three-Dimensional MEMS Biochemical Sensors for Low Concentration Aqueous Solutions
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Topics: Microelectromechanical systems, Sensors, Electrodes, Design, Electrochemical impedance spectroscopy, Electrochemistry, Enzymes, Phthalate plasticizers, Polysilicon, Proteins
Proceedings Papers

Detection of Pathogens and Formation of Biofilms Using a Three-Dimensional Biomimetic Biosensing Platform

Roya Mazrouei, Minako Sumita, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A006, August 26–29, 2018
Paper No: DETC2018-86222
https://doi.org/10.1115/DETC2018-86222
View Paper titled, Detection of Pathogens and Formation of Biofilms Using a Three-Dimensional Biomimetic Biosensing Platform
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Topics: Biomimetics, Capacitance, Electrodes, Biosensors, Microorganisms, Finite element methods, Finite element model, Food safety, Polymers, Polysilicon
Proceedings Papers

Temperature Compensation in MEMS Capacitive Pressure Sensors for Harsh Environment Applications

Rahul Jitendrab Suthar, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2018, Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems, V004T08A028, August 26–29, 2018
Paper No: DETC2018-86357
https://doi.org/10.1115/DETC2018-86357
View Paper titled, Temperature Compensation in MEMS Capacitive Pressure Sensors for Harsh Environment Applications
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Topics: Microelectromechanical systems, Pressure sensors, Temperature, Membranes, Design, Metals, Capacitance, Deformation, Pressure, Simulation
Proceedings Papers

Three-Dimensional Biomimetic Biosensors for Food Safety Applications

Brian Huffman, Roya Mazrouei, Joseph Bevelheimer, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2017, Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems, V004T09A002, August 6–9, 2017
Paper No: DETC2017-67446
https://doi.org/10.1115/DETC2017-67446
View Paper titled, Three-Dimensional Biomimetic Biosensors for Food Safety Applications
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Topics: Biomimetics, Biosensors, Food safety, Sensors, Microorganisms, Electrodes, Finite element analysis, Porous materials, Simulation results, Temperature
Proceedings Papers

Design and Modelling of a MEMS Capacitive Temperature Sensor With Linear Capacitance-Temperature Response

Mohammad Shavezipur, Chris Wong, Patricia Nieva, Amir Khajepour
Proc. ASME. IMECE2009, Volume 12: Micro and Nano Systems, Parts A and B, 513-518, November 13–19, 2009
Paper No: IMECE2009-12790
https://doi.org/10.1115/IMECE2009-12790
View Paper titled, Design and Modelling of a MEMS Capacitive Temperature Sensor With Linear Capacitance-Temperature Response
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Topics: Capacitance, Design, Microelectromechanical systems, Modeling, Temperature, Temperature sensors, Electrodes, Engineering simulation, Finite element methods, Finite element model
Proceedings Papers

Modeling of a Multifunctional Pressure-Temperature Sensor

Ali Najafi Sohi, Mohammad Shavezipur, Patricia Nieva, Amir Khajepour
Proc. ASME. IMECE2009, Volume 12: Micro and Nano Systems, Parts A and B, 527-533, November 13–19, 2009
Paper No: IMECE2009-12930
https://doi.org/10.1115/IMECE2009-12930
View Paper titled, Modeling of a Multifunctional Pressure-Temperature Sensor
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Topics: Modeling, Pressure, Sensors, Temperature, Aviation, Capacitance, Circuits, Complementary metal oxide semiconductors, Energy generation, Engineering simulation
Proceedings Papers

A Linearly Tunable MEMS Capacitor With Segmented Electrode and Enhanced Structure

Mohammad Shavezipur, Seyed Mohammad Hashemi, Amir Khajepour, Patricia Nieva
Proc. ASME. IMECE2008, Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 489-493, October 31–November 6, 2008
Paper No: IMECE2008-68081
https://doi.org/10.1115/IMECE2008-68081
View Paper titled, A Linearly Tunable MEMS Capacitor With Segmented Electrode and Enhanced Structure
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Topics: Capacitors, Electrodes, Microelectromechanical systems, Stiffness, Design, Cantilever beams, Capacitance, Dimensions, Manufacturing, Optimization
Proceedings Papers

Development of a Linearly Tunable Modified Butterfly-Shape MEMS Capacitor

Mohammad Shavezipur, Seyed Mohammad Hashemi, Amir Khajepour, Patricia Nieva
Proc. ASME. IMECE2008, Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 495-500, October 31–November 6, 2008
Paper No: IMECE2008-68090
https://doi.org/10.1115/IMECE2008-68090
View Paper titled, Development of a Linearly Tunable Modified Butterfly-Shape MEMS Capacitor
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Topics: Capacitors, Microelectromechanical systems, Shapes, Design, Electrodes, Stiffness, Capacitance, Computer simulation, Corners (Structural elements), Geometry