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Jeahyeong Han
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Proceedings Papers

AFM Verification of CF n Surface Treatment Effect and Its Correlation to Stiction Reduction in Microvalves

Jeahyeong Han, Daniel Joe, Rich I. Masel, Mark A. Shannon
Proc. ASME. IDETC-CIE2008, Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems, 543-545, August 3–6, 2008
Paper No: DETC2008-49842
DOI: https://doi.org/10.1115/DETC2008-49842
View Paper titled, AFM Verification of CF n Surface Treatment Effect and Its Correlation to Stiction Reduction in Microvalves
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Topics: Atomic force microscopy, Stiction, Surface finishing, Adhesion, Valves, Coatings, Membranes, Particulate matter, Plasmas (Ionized gases), Probes
Proceedings Papers

Peeling Mode Capacitive Pressure Sensor for Sub-KPA Pressure Measurements

Jeahyeong Han, Shunzhou Yang, Mark A. Shannon
Proc. ASME. IMECE2006, Microelectromechanical Systems, 711-712, November 5–10, 2006
Paper No: IMECE2006-15521
DOI: https://doi.org/10.1115/IMECE2006-15521
View Paper titled, Peeling Mode Capacitive Pressure Sensor for Sub-KPA Pressure Measurements
Click here to open pdf in another window PDF for Peeling Mode Capacitive Pressure Sensor for Sub-KPA Pressure Measurements
Topics: Pressure measurement, Pressure sensors, Pressure, Membranes, Capacitance, Deflection, Residual stresses, Deformation, Electrodes, Manometers