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Keywords: FE model
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Journal Articles
Publisher: ASME
Article Type: Research-Article
ASME J. Risk Uncertainty Part B. March 2022, 8(1): 011105.
Paper No: RISK-20-1111
Published Online: August 6, 2021
...-based FE model is developed to simulate the electrodeposition process with different combinations of operation parameters as input; the thickness variation of the electroplated silicon layer is calculated; the design sensitivity analyses are then conducted to identify the critical parameters with high...