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Keywords: pressure sensorsClose
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
...S. Sathyanarayanan; A. Vimala Juliet Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400...
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2010, 1(4): 041003.
Published Online: October 21, 2010
... of pressure load. The spring constant and the effect of fringing field capacitance is evaluated to optimize the design. The key factors of design information for the fabrication of millibar pressure sensor are analyzed. Using this model, equilibrium points and their stability are studied at different...