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Keywords: capacitive pressure sensorClose
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
...S. Sathyanarayanan; A. Vimala Juliet Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400...