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Keywords: PolySi
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Journal Articles
Article Type: Technical Briefs
J. Nanotechnol. Eng. Med. August 2011, 2(3): 034502.
Published Online: January 10, 2012
... element analysis micromachining pressure sensors capacitive pressure sensor MEMS PolySi sensor Physical parameters such as pressure, stress, strain, and fluid flow within the human body are critical indicators for detection of many diseases [( 1 )]. Today, many physical parameters...