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Keywords: vibration
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021005.
Paper No: JMNM-22-1031
Published Online: February 1, 2023
... a novel electric-field and mechanical vibration-assisted AFM-based nanofabrication approach, which enables high-resolution (sub-10 nm toward sub-5 nm) and high-efficiency nanopatterning processes. The integration of in-plane vibration with the electric field increases the patterning speed, broadens...
Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2020, 8(2): 021002.
Paper No: JMNM-19-1046
Published Online: April 1, 2020
...Yang Yang; Keyu Chen; Ping Guo Acoustic radiation force in the near-field of a vibrating source can be utilized to lift and transport objects, which provides a noncontact driving technology in addition to maglev. This paper presents a novel design of a self-levitated planar stage based on near...