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Keywords: nanolithography
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Journal Articles
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021005.
Paper No: JMNM-22-1031
Published Online: February 1, 2023
...Huimin Zhou; Yingchun Jiang; Changhong Ke; Jia Deng Atomic force microscope (AFM)-based nanolithography is a cost-effective nanopatterning technique that can fabricate nanostructures with arbitrary shapes. However, existing AFM-based nanopatterning approaches have limitations in the patterning...
