Abstract

Most researches on laser drilling focus on the reduction of the hole taper to improve the hole quality. However, tapered microholes are very useful in some industry applications. In this paper, a new method of laser drilling tapered microholes by tilting and rotating the workpiece is put forward and corresponding experimental installation is setup. The relationship between workpiece coordinate system and laser processing coordinate system is established to eliminate the hyperbolic error induced by this method. The microhole is machined through rotating the workpiece and the machining speed is achieved with laser beam circle motion by the galvanometer system. The tapered microholes are obtained on ceramic and high temperature alloy materials using the present method and the taper accuracy can be improved through the compensation strategy. High reliability and repeatability ensure that this method can be applied in industry application.

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