... microchannel flow micropumps neurophysiology piezoelectric actuators pressure sensors 09 07 2009 2009 American Society of Mechanical Engineers ...

... ). In the literature, piezoelectric actuators are commonly used for meso∕micro displacement applications, due to their small size, lightweight, low power requirement, quick respond, and relatively high force output ( 11 ). piezoelectric actuators biological tissues surgery biomedical equipment medical...