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Keywords: MEMS
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Journal Articles
Publisher: ASME
Article Type: Design Of Medical Devices Conference Abstracts
J. Med. Devices. June 2009, 3(2): 027553.
Published Online: July 24, 2009
... frequencies. The maximum flow rate for the dual-chamber remains at 27.73 μ l / min under 0.4 A input current with an excitation frequency of 3 Hz. For comparison, a single-chamber micropump reaches a maximum flow rate of 19.61 μ l / min with a resonant frequency of 4.36 Hz under the same condition. MEMS...