Abstract
The usually high eigenfrequencies of miniaturized oscillators can be significantly lowered by reducing the stiffness through stiffness compensation. In this work, a mechanical design for a compliant ortho-planar mechanism is proposed in which the stiffness is compensated to such a degree that it can be identified as statically balanced. The mechanism was fabricated using laser micro-machining and subsequently preloaded through packaging. The statically balanced property of the mechanism was experimentally validated by a measurement of the force–deflection relation. A piezoelectric version of the design was fabricated for the purpose of energy harvesting from low-frequency motion. For a sub 1 Hz excitation, the device demonstrated an average power output of 21.7 μW and an efficiency that compares favorably to piezoelectric energy harvesters reported in the literature. Therefore, it was found that stiffness compensation is a promising method for the design of piezoelectric energy harvesters for low-frequency motions.
