Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods, which complicates the design of devices capable of complex motions. For applications that need a micromechanism that rotates out of the plane of fabrication with an in-plane rotational input, or that rotates spatially about a point, spherical kinematics may represent an appropriate solution. This paper describes the design of spherical mechanisms for MEMS including the design of joints and links, and what may be the first demonstration of two spherical micromechanism building blocks: the spherical four-bar micromechanism and the spherical slider-crank micromechanism. Two other micromechanisms are demonstrated to illustrate how the building block devices may be used to create more complex devices.
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March 2008
Technical Briefs
Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems
Craig P. Lusk,
Craig P. Lusk
Department of Mechanical Engineering,
University of South Florida
, 4202 East Fowler Avenue ENB 118, Tampa, FL 33620-5350
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Larry L. Howell
Larry L. Howell
Department of Mechanical Engineering,
e-mail: lhowell@et.byu.edu
Brigham Young University
, Provo, UT 84602
Search for other works by this author on:
Craig P. Lusk
Department of Mechanical Engineering,
University of South Florida
, 4202 East Fowler Avenue ENB 118, Tampa, FL 33620-5350
Larry L. Howell
Department of Mechanical Engineering,
Brigham Young University
, Provo, UT 84602e-mail: lhowell@et.byu.edu
J. Mech. Des. Mar 2008, 130(3): 034503 (4 pages)
Published Online: February 5, 2008
Article history
Received:
April 20, 2006
Revised:
May 22, 2007
Published:
February 5, 2008
Citation
Lusk, C. P., and Howell, L. L. (February 5, 2008). "Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems." ASME. J. Mech. Des. March 2008; 130(3): 034503. https://doi.org/10.1115/1.2829914
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