... scanning setup, evolved from KEI experiment, is capable of wafer apex characterization, but the areal imaging setup features high efficiency and enables simultaneous characterization of wafer-edge quality along two bevels and apex directions. Details of wafer-edge inspection and fringe pattern analysis...

... Graphical Abstract Figure hole edge metrology inspection diffractometry fringe pattern pattern analysis inspection and quality control Hole metrology and inspection ensure that holes fabricated by cutting tools, lasers, or chemical processes meet their required specification including...