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Keywords: lithography
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Journal Articles
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030901.
Published Online: May 13, 2010
... processes that are currently commonly employed rely on complex lithography-based pattern transfers and/or on beam-based direct write processes. Unfortunately, the required equipment to perform these techniques are often capital intensive and necessitate particular operating temperatures or vacuum conditions...
Journal Articles
Article Type: Technical Papers
J. Manuf. Sci. Eng. May 2000, 122(2): 316–322.
Published Online: June 1, 1999
... Editor: S. G. Kapoor. 01 Sept 1998 01 June 1999 machine tools lithography manufacturing processes polymers design for manufacture Rapid prototyping (RP) technologies are valuable for reducing product development cycle times by creating physical models for visual...