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Keywords: focused ion beam technology
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. February 2010, 132(1): 011005.
Published Online: January 6, 2010
... the same size; after FIB-induced deposition one hole size was reduced. ( a )–( d ) show a circular hole fill-in, closed and opened again 15 12 2008 27 10 2009 06 01 2010 06 01 2010 epitaxial growth epitaxial layers etching focused ion beam technology...
