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Keywords: epitaxial layers
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. February 2010, 132(1): 011005.
Published Online: January 6, 2010
... in making the free-standing film: An n -type epitaxial layer grown on a p -type wafer forms a p - n junction diode; in the electrochemical etching the provided potential is in reverse bias on the p - n diode, such that a thin passivating silicon dioxide layer forms; hence...
