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Keywords: epitaxial growth
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070901.
Paper No: MANU-23-1294
Published Online: April 22, 2024
... with orderly lattice arrangement, good surface morphology, and low doping concentration is required. During epitaxial growth, the high reaction temperature and its distribution are generally difficult to measure and will affect the properties of the epitaxial growth layer. This study presents a thermal-field...
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. February 2010, 132(1): 011005.
Published Online: January 6, 2010
... the same size; after FIB-induced deposition one hole size was reduced. ( a )–( d ) show a circular hole fill-in, closed and opened again 15 12 2008 27 10 2009 06 01 2010 06 01 2010 epitaxial growth epitaxial layers etching focused ion beam technology...
