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Integrated circuit fabrication
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070904.
Paper No: MANU-23-1598
Published Online: April 22, 2024
Journal Articles
Publisher: ASME
Article Type: Editorial
J. Manuf. Sci. Eng. September 2023, 145(9): 090201.
Paper No: MANU-23-1357
Published Online: June 30, 2023
Journal Articles
Publisher: ASME
Article Type: Review Articles
J. Manuf. Sci. Eng. September 2023, 145(9): 090801.
Paper No: MANU-23-1179
Published Online: June 30, 2023
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2022, 144(6): 061008.
Paper No: MANU-21-1317
Published Online: December 3, 2021