Temperature at various depths from the ground surface in workpiece is measured accurately by using the newly developed PVD film method, in which a thin film deposited on the workpiece is used as a thermal sensor. The influence of workpiece speed, depth of cut and wheel speed on the temperature of the workpiece was investigated under conventional surface grinding with no grinding fluids. The measured results were compared with Takazawa’s approximation based on Jaeger’s heat conduction solution to the moving heat source problem. The maximum temperature rise at the surface and the temperature gradient close to the surface were obtained and correlated with the residual stress induced at the surface. [S1087-1357(00)70302-9]

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