... devices Raman spectra silicon thermometers In order to predict the performance and reliability of packaged MEMS devices, validated models of microsystems in varying environments are needed. Models of thermal performance of MEMS at varying pressures have been developed that account for noncontinuum...

... thermometer and high performance heater. The thermometer/heater is a 100-nm-thick and 600 μ m wide Z-shaped platinum wire resistor, fabricated on a thermally oxidized silicon substrate of a CNT sample to heat a 2 × 2 mm 2 wick area. As a heater, it provides a direct heating effect without a thermal interface...

... microactuators temperature measurement thermometers Raman spectroscopy thermometry MEMS thermal actuators Temperature diagnostics are essential tools for the evaluation and design of microelectronics devices and microelectromechanical systems (MEMSs). The length scale of these devices...

...Keunhan Park; Graham L. W. Cross; Zhuomin M. Zhang; William P. King This work describes the heat transfer process from a heated microcantilever to a substrate. A platinum-resistance thermometer with a 140 nm width was fabricated on a Si O 2 -coated silicon substrate. The temperature coefficient...

...J. Iragorry; Y.-X. Tao To develop a better defrosting control system on finned evaporators of a refrigeration system, a study is conducted to better quantify the frosting and defrosting processes by using an infrared thermometer to determine the frost surface temperature. For gradual frost...

...H. J. Kim; K. D. Kihm 16 07 2002 thermometers laser applications fluorescence dyes temperature distribution 596 Õ Vol. 124, AUGUST 2002 Transactions of the ASME 2002 ASME ...