... and fluid flow in microheat sinks, micropumps, microturbines, microengines, micromixers, as well as microsensors. Recent experimental techniques in the thermal microelectromechanical systems (MEMS) field have also been presented. Although some thermal MEMS devices have penetrated the commercial market...

... temperature distribution microsensors thermal resistance As electronic equipment becomes smaller and more advanced, it necessitates higher circuit integration per unit area, which in turn contributes to a rapid increase of heat generation ( 1 ). As a consequence, the working temperature...