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Journal Articles

Experimental Study of the Effect of Precursor Composition on the Microstructure of Gallium Nitride Thin Films Grown by the MOCVD Process

Omar Dhannoon Jumaah, Yogesh Jaluria

J. Heat Transfer. October 2021, 143(10): 102201.

Paper No: HT-21-1107

DOI: https://doi.org/10.1115/1.4051672

Published Online: September 8, 2021

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Topics: Gallium nitride, Metalorganic chemical vapor deposition, Thin films, Flow (Dynamics), Sapphire, Semiconductor wafers

Journal Articles

The Effect of Carrier Gas and Reactor Pressure on Gallium Nitride Growth in MOCVD Manufacturing Process

Omar Jumaah, Yogesh Jaluria

J. Heat Transfer. August 2019, 141(8): 082101.

Paper No: HT-18-1529

DOI: https://doi.org/10.1115/1.4043895

Published Online: June 12, 2019

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Topics: Flow (Dynamics), Gallium nitride, Manufacturing, Metalorganic chemical vapor deposition, Pressure, Thin films, Semiconductor wafers, Computer simulation

Journal Articles

Development of a Device for the Nondestructive Thermal Diffusivity Determination of Combustion Chamber Deposits and Thin Coatings

Mark A. Hoffman, Benjamin J. Lawler, Zoran S. Filipi, Orgun A. Güralp, Paul M. Najt

J. Heat Transfer. July 2014, 136(7): 071601.

Paper No: HT-13-1204

DOI: https://doi.org/10.1115/1.4026908

Published Online: March 17, 2014

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Topics: Combustion chambers, Heat flux, Probes, Radiation (Physics), Semiconductor wafers, Temperature, Thermal diffusivity, Homogeneous charge compression ignition engines, Coatings, Graphite

Journal Articles

Design and Evaluation of a MEMS-Based Stirling Microcooler

Dongzhi Guo, Jinsheng Gao, Alan J. H. McGaughey, Gary K. Fedder, Matthew Moran, Shi-Chune Yao

J. Heat Transfer. November 2013, 135(11): 111003.

Paper No: HT-12-1144

DOI: https://doi.org/10.1115/1.4024596

Published Online: September 23, 2013

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Topics: Cooling, Cycles, Design, Heat, Heat transfer, Microcoolers, Microelectromechanical systems, Porosity, Silicon, Temperature

Journal Articles

Fabrication and Experimental Characterization of Nanochannels

Vinh-Nguyen Phan, Nam-Trung Nguyen, Chun Yang, Pierre Joseph, Anne-Marie Gué

J. Heat Transfer. May 2012, 134(5): 051012.

DOI: https://doi.org/10.1115/1.4005702

Published Online: April 13, 2012

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Topics: Drying, Glass, Manufacturing, Nanofluidics, Reactive-ion etching, Silicon, Microchannels, Semiconductor wafers, Etching, Experimental characterization

Journal Articles

Infrared Radiative Properties of Heavily Doped Silicon at Room Temperature

S. Basu, B. J. Lee, Z. M. Zhang

J. Heat Transfer. February 2010, 132(2): 023301.

DOI: https://doi.org/10.1115/1.4000171

Published Online: November 30, 2009

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Topics: Boron, Electron mobility, Ionization, Modeling, Reflectance, Silicon, Temperature, Thin films, Annealing, Wavelength

Journal Articles

Experimental and Numerical Study of Single Bubble Dynamics on a Hydrophobic Surface

Youngsuk Nam, Jinfeng Wu, Gopinath Warrier, Y. Sungtaek Ju

J. Heat Transfer. December 2009, 131(12): 121004.

DOI: https://doi.org/10.1115/1.3216038

Published Online: October 15, 2009

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Topics: Bubbles, Dynamics (Mechanics), Semiconductor wafers

Journal Articles

Subcooled Pool Boiling Experiments on Horizontal Heaters Coated With Carbon Nanotubes

V. Sathyamurthi, H-S. Ahn, D. Banerjee, S. C. Lau

J. Heat Transfer. July 2009, 131(7): 071501.

DOI: https://doi.org/10.1115/1.3000595

Published Online: April 30, 2009

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Topics: Film boiling, Heat flux, Multi-walled carbon nanotubes, Pool boiling, Silicon, Subcooling, Critical heat flux, Boiling, Semiconductor wafers, Heat transfer

Journal Articles

Microscale Temperature Measurements Near the Triple Line of an Evaporating Thin Liquid Film

Hemanth K. Dhavaleswarapu, Suresh V. Garimella, Jayathi Y. Murthy

J. Heat Transfer. June 2009, 131(6): 061501.

DOI: https://doi.org/10.1115/1.3090525

Published Online: April 2, 2009

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Topics: Evaporation, Temperature, Heat flux, Temperature measurement, Heat transfer, Microscale devices, Semiconductor wafers, Thin films, Heptane

Journal Articles

Radiative Properties of Patterned Wafers With Nanoscale Linewidth

Y.-B. Chen, Z. M. Zhang, P. J. Timans

J. Heat Transfer. January 2007, 129(1): 79–90.

DOI: https://doi.org/10.1115/1.2401201

Published Online: June 8, 2006

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Topics: Diffraction gratings, Nanoscale phenomena, Radiation (Physics), Semiconductor wafers, Temperature, Wavelength, Waves, Diffraction, Polarization (Electricity), Polarization (Light)

Journal Articles

Pool Boiling Experiments on Multiwalled Carbon Nanotube (MWCNT) Forests

Hee Seok Ahn, Nipun Sinha, Mei Zhang, Debjyoti Banerjee, Shaoli Fang, Ray H. Baughman

J. Heat Transfer. December 2006, 128(12): 1335–1342.

DOI: https://doi.org/10.1115/1.2349511

Published Online: May 29, 2006

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Topics: Heat flux, Multi-walled carbon nanotubes, Pool boiling, Semiconductor wafers, Silicon, Critical heat flux, Boiling, Film boiling

Journal Articles

Investigation of Lightpipe Volumetric Radiation Effects in RTP Thermometry

David J. Frankman, Brent W. Webb, Matthew R. Jones

J. Heat Transfer. February 2006, 128(2): 132–141.

DOI: https://doi.org/10.1115/1.2136917

Published Online: July 28, 2005

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Topics: Absorption, Heat conduction, Radiation (Physics), Radiative heat transfer, Semiconductor wafers, Separation (Technology), Temperature, Temperature distribution, Temperature measurement, Temperature profiles

Journal Articles

Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films

S. P. Vanka, Gang Luo, Nick G. Glumac

J. Heat Transfer. October 2004, 126(5): 764–775.

DOI: https://doi.org/10.1115/1.1795232

Published Online: November 16, 2004

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Topics: Chemical vapor deposition, Flow (Dynamics), Rotation, Temperature, Pressure, Stagnation flow, Thin films, Mixed convection, Semiconductor wafers

Journal Articles

Radiative Properties of Semitransparent Silicon Wafers With Rough Surfaces

Y. H. Zhou, Z. M. Zhang

J. Heat Transfer. June 2003, 125(3): 462–470.

DOI: https://doi.org/10.1115/1.1565089

Published Online: May 20, 2003

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Topics: Reflectance, Semiconductor wafers, Surface roughness, Radiation (Physics), Silicon, Absorption, Reflection, Temperature, Wavelength

Journal Articles

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

A. G. Mathews, J. E. Peterson

J. Heat Transfer. June 2002, 124(3): 564–570.

DOI: https://doi.org/10.1115/1.1469525

Published Online: May 10, 2002

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Topics: Buoyancy, Chemical vapor deposition, Flow (Dynamics), Flow visualization, High temperature, Light scattering, Momentum, Temperature, Temperature measurement, Transients (Dynamics)

Journal Articles

Photo-Acoustic Measurement of Thermal Conductivity of Thin Films and Bulk Materials

Xinwei Wang, Hanping Hu, Xianfan Xu

J. Heat Transfer. February 2001, 123(1): 138–144.

DOI: https://doi.org/10.1115/1.1337652

Published Online: June 25, 2000

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Topics: Bulk solids, Fittings, Nickel, Phase shift, Thermal barrier coatings, Thermal conductivity, Thermal conductivity measurement, Thin films, Signals, Surface roughness

Journal Articles

Optical Measurement of Thermal Contact Conductance Between Wafer-Like Thin Solid Samples

Y. Ohsone, G. Wu, J. Dryden, F. Zok, A. Majumdar

J. Heat Transfer. November 1999, 121(4): 954–963.

DOI: https://doi.org/10.1115/1.2826086

Published Online: November 1, 1999

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Topics: Contact resistance, Optical measurement, Semiconductor wafers

Journal Articles

Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor

J. F. Horton, J. E. Peterson

J. Heat Transfer. February 2000, 122(1): 165–170.

DOI: https://doi.org/10.1115/1.521447

Published Online: September 7, 1999

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Topics: Chemical vapor deposition, Flow (Dynamics), Flow visualization, Light scattering, Mixed convection, Semiconductor wafers, Temperature, Temperature measurement, Transients (Dynamics), Lasers

Journal Articles

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

M. Asheghi, M. N. Touzelbaev, K. E. Goodson, Y. K. Leung, S. S. Wong

J. Heat Transfer. February 1998, 120(1): 30–36.

DOI: https://doi.org/10.1115/1.2830059

Published Online: February 1, 1998

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Topics: Crystals, Heat conduction, Silicon, Silicon-on-insulator, Temperature, Thermal conductivity, Phonons, Semiconductor wafers, Transistors, Cantilevers

Journal Articles

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

X. Xu, C. P. Grigoropoulos, R. E. Russo

J. Heat Transfer. February 1995, 117(1): 17–24.

DOI: https://doi.org/10.1115/1.2822301

Published Online: February 1, 1995

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Topics: Excimer lasers, Heating, Lasers, Polysilicon, Reflectance, Temperature, Transients (Dynamics), Chemical vapor deposition, Heat transfer, Manufacturing

Journal citation

NARROW

Experimental Study of the Effect of Precursor Composition on the Microstructure of Gallium Nitride Thin Films Grown by the MOCVD Process

The Effect of Carrier Gas and Reactor Pressure on Gallium Nitride Growth in MOCVD Manufacturing Process

Development of a Device for the Nondestructive Thermal Diffusivity Determination of Combustion Chamber Deposits and Thin Coatings

Design and Evaluation of a MEMS-Based Stirling Microcooler

Fabrication and Experimental Characterization of Nanochannels

Infrared Radiative Properties of Heavily Doped Silicon at Room Temperature

Experimental and Numerical Study of Single Bubble Dynamics on a Hydrophobic Surface

Subcooled Pool Boiling Experiments on Horizontal Heaters Coated With Carbon Nanotubes

Microscale Temperature Measurements Near the Triple Line of an Evaporating Thin Liquid Film

Radiative Properties of Patterned Wafers With Nanoscale Linewidth

Pool Boiling Experiments on Multiwalled Carbon Nanotube (MWCNT) Forests

Investigation of Lightpipe Volumetric Radiation Effects in RTP Thermometry

Numerical Study of Mixed Convection Flow in an Impinging Jet CVD Reactor for Atmospheric Pressure Deposition of Thin Films

Radiative Properties of Semitransparent Silicon Wafers With Rough Surfaces

Flow Visualizations and Transient Temperature Measurements in an Axisymmetric Impinging Jet Rapid Thermal Chemical Vapor Deposition Reactor

Photo-Acoustic Measurement of Thermal Conductivity of Thin Films and Bulk Materials

Optical Measurement of Thermal Contact Conductance Between Wafer-Like Thin Solid Samples

Rayleigh Light Scattering Measurements of Transient Gas Temperature in a Rapid Chemical Vapor Deposition Reactor

Temperature-Dependent Thermal Conductivity of Single-Crystal Silicon Layers in SOI Substrates

Transient Temperature During Pulsed Excimer Laser Heating of Thin Polysilicon Films Obtained by Optical Reflectivity Measurement

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