This work describes the heat transfer process from a heated microcantilever to a substrate. A platinum-resistance thermometer with a width was fabricated on a -coated silicon substrate. The temperature coefficient of resistance estimated from the measurement was , about one-fifth of the bulk value of platinum. The temperature distribution on the substrate was obtained from the thermometer reading, as the cantilever raster scanned the substrate. Comparison between the measurement and calculation reveals that up to 75% of the cantilever power is directly transferred to the substrate through the air gap. From the force-displacement experiment, the effective tip-specimen contact thermal conductance was estimated to be around . The findings from this study should help understand the thermal interaction between the heated cantilever and the substrate, which is essential to many nanoscale technologies using heated cantilevers.
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e-mail: zhuomin.zhang@me.gatech.edu
e-mail: wpk@uiuc.edu
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Research Papers
Experimental Investigation on the Heat Transfer Between a Heated Microcantilever and a Substrate
Keunhan Park,
Keunhan Park
George W. Woodruff School of Mechanical Engineering,
Georgia Institute of Technology
, Atlanta, GA 30332
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Graham L. W. Cross,
Graham L. W. Cross
School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN),
Trinity College Dublin
, Dublin 2, Ireland
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Zhuomin M. Zhang,
Zhuomin M. Zhang
George W. Woodruff School of Mechanical Engineering,
e-mail: zhuomin.zhang@me.gatech.edu
Georgia Institute of Technology
, Atlanta, GA 30332
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William P. King
William P. King
Department of Mechanical Science and Engineering,
e-mail: wpk@uiuc.edu
University of Illinois Urbana-Champaign
, Urbana, IL 61801
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Keunhan Park
George W. Woodruff School of Mechanical Engineering,
Georgia Institute of Technology
, Atlanta, GA 30332
Graham L. W. Cross
School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN),
Trinity College Dublin
, Dublin 2, Ireland
Zhuomin M. Zhang
George W. Woodruff School of Mechanical Engineering,
Georgia Institute of Technology
, Atlanta, GA 30332e-mail: zhuomin.zhang@me.gatech.edu
William P. King
Department of Mechanical Science and Engineering,
University of Illinois Urbana-Champaign
, Urbana, IL 61801e-mail: wpk@uiuc.edu
J. Heat Transfer. Oct 2008, 130(10): 102401 (9 pages)
Published Online: August 8, 2008
Article history
Received:
July 25, 2007
Revised:
November 12, 2007
Published:
August 8, 2008
Citation
Park, K., Cross, G. L. W., Zhang, Z. M., and King, W. P. (August 8, 2008). "Experimental Investigation on the Heat Transfer Between a Heated Microcantilever and a Substrate." ASME. J. Heat Transfer. October 2008; 130(10): 102401. https://doi.org/10.1115/1.2953238
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