It is recently conceptualized that nano-scale machining might be achieved by coupling electron emission with radiation transfer. A laser may be used to heat a workpiece to a threshold temperature, and a nano-probe might then transfer additional energy via electron emission to remove a minute amount of material. To investigate this hypothesis, a detailed numerical study is presented. The electron-beam transport is modeled using a Monte Carlo approach, and a radiation transfer model that includes Fresnel reflections is adapted to simulate laser heating. The numerical study suggests that approximately 0.5 W from a single electron-beam is sufficient to initialize local evaporation from a gold film. With the use of a laser, the required power can be halved if the film is sufficiently thin. This paper describes the details of the numerical study and establishes guidelines for such nano-scale machining processes.
Nano-Scale Machining Via Electron Beam and Laser Processing
Contributed by the Heat Transfer Division for publication in the JOURNAL OF HEAT TRANSFER. Manuscript received by the Heat Transfer Division January 21, 2003; revision received May 12, 2004. Associate Editor: G. Chen.
- Views Icon Views
- Share Icon Share
- Search Site
Wong, B. T., Mengu¨c¸, M. P., and Vallance , R. R. (May 12, 2004). "Nano-Scale Machining Via Electron Beam and Laser Processing ." ASME. J. Heat Transfer. August 2004; 126(4): 566–576. https://doi.org/10.1115/1.1777581
Download citation file: