Numerical analysis of laser chemical vapor deposition (LCVD) of titanium nitride by a moving laser beam is presented. The effect of natural convection due to temperature and concentration differences in the gaseous mixture is modeled and implemented into thermal model of LCVD by a moving laser beam. The problem is formulated in a coordinate system that moves with the laser beam and therefore, the problem is a quasi-steady state problem. The results show that the effect of natural convection on the shape of deposited film is very insignificant for cases with a laser power of 300 W but becomes important when the laser power is increased to 360 W.
Quasi-Steady State Natural Convection in Laser Chemical Vapor Deposition With a Moving Laser Beam
Contributed by the Heat Transfer Division for publication in the JOURNAL OF HEAT TRANSFER. Manuscript received by the Heat Transfer Division April 23, 2002; revision received November 15, 2002. Associate Editor: K. S. Ball.
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Zhang, Y. (May 20, 2003). "Quasi-Steady State Natural Convection in Laser Chemical Vapor Deposition With a Moving Laser Beam ." ASME. J. Heat Transfer. June 2003; 125(3): 429–437. https://doi.org/10.1115/1.1565088
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