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Keywords: X-ray lithography
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Journal Articles
Article Type: Research Papers
J. Eng. Gas Turbines Power. July 2009, 131(4): 042503.
Published Online: April 10, 2009
... numerical methods. It was predicted that the designed mesoscale tilting pad gas bearings would show very stable operation up to a maximum simulated speed of 1,000,000 rpm. The designed mesoscale tilting pad gas bearings were manufactured using X-ray lithography and electroplating. 16 12 2007 27 10...
