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Keywords: PowerMEMS
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Journal Articles
Article Type: Research Papers
J. Eng. Gas Turbines Power. July 2009, 131(4): 042503.
Published Online: April 10, 2009
...Daejong Kim; Aaron M. Rimpel; Suk Sang Chang; Jong Hyun Kim This paper introduces a design and manufacturing of mesoscale flexure pivot tilting pad gas bearing with a diameter of 5 mm and a length of 1–2.5 mm for PowerMEMS (micro electromechanical systems for power generation) applications...