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Keywords: metallic thin films
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Journal Articles
Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Electron. Packag. September 2004, 126(3): 301–307.
Published Online: October 6, 2004
... . Manuscript received February 2003; final revision, February 2004. Associate Editor: A. Y-H. Hung. 01 February 2003 01 February 2004 06 10 2004 titanium metallic thin films fracture toughness internal stresses delamination surface cracks adhesion silicon elemental...