The conjecture discussed in our previous paper [Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C., 2014, “Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors,” ASME J. Electron. Packag., 136(4), p. 041014; Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C., 2018, Erratum: “Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors,” ASME J. Electron. Packag., 140(1), p. 017001] was backed up by measurements and simulation results, but not mathematically proven. A proof based upon two-port impedance parameter reciprocity is presented with additional experimental confirmation.
References
1.
Jaeger
, R. C.
, Motalab
, M.
, Hussain
, S.
, and Suhling
, J. C.
, 2014
, “Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors
,” ASME J. Electron. Packag.
, 136
(4
), p. 041014
.2.
Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C.,
2018
, “Erratum: ‘Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors’
,” ASME J. Electron. Packag.
, 140
(1), p. 017001
.3.
Mian
, A. K. M.
, Suhling
, J. C.
, and Jaeger
, R. C.
, 2006
, “The van der Pauw Stress Sensor
,” IEEE Sens. J.
, 6
(2
), pp. 340
–356
.4.
van der Pauw
, L. J.
, 1958
, “A Method of Measuring Specific Resistivity and Hall Effect of Disks of Arbitrary Shape
,” Philips Res. Rep.
, 13
, pp. 1
–9
.5.
Hayt
, W. H.
, Kemmerly
, J. E.
, and Durbin
, S. M.
, 2007
, Engineering Circuit Analysis
, 7th ed., McGraw-Hill
, New York
. 6.
Jaeger
, R. C.
, Chen
, J.
, Suhling
, J. C.
, and Fursin
, L.
, 2018
, “Design and Calibration of Resistive Stress Sensors on 4H Silicon Carbide
,” ASME Paper No. IPACK2018-8219.Copyright © 2018 by ASME
You do not currently have access to this content.
