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Keywords: scanning tunnelling microscopy
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. March 2004, 126(1): 187–197.
Published Online: April 12, 2004
... microscope used in nanotechnology applications 26 . Simulation and experimental results are presented to illustrate the efficacy of the proposed approach to design optimal scan-trajectories. scanning tunnelling microscopy micromechanical devices position control physical instrumentation control...
