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Keywords: scanning electron microscopy
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Journal Articles
Article Type: Technical Briefs
J. Dyn. Sys., Meas., Control. November 2009, 131(6): 064501.
Published Online: October 30, 2009
... others are not. One probe is examined in detail, using scanning electron microscopy to quantify the size of the tip and the thickness uniformity of the probe, and laser Doppler vibrometry is used to measure the first four mode shapes. The results suggest that this probe’s thickness is significantly...