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Research Papers

A Micropump Sucker Using a Piezo-Driven Flexible Mechanism

[+] Author and Article Information
Jihao Liu

Robotics Institute,
Shanghai Jiao Tong University,
Shanghai 200240, China
e-mail: yihongyishui@sjtu.edu.cn

Weixin Yan

Robotics Institute,
Shanghai Jiao Tong University,
Shanghai 200240, China
e-mail: xiaogu4524@sjtu.edu.cn

Yanzheng Zhao

Robotics Institute,
Shanghai Jiao Tong University,
Shanghai 200240, China
e-mail: yzh-zhao@sjtu.edu.cn

Contributed by the Mechanisms and Robotics Committee of ASME for publication in the Journal of Mechanisms and Robotics. Manuscript received June 20, 2018; final manuscript received April 13, 2019; published online May 17, 2019. Assoc. Editor: Xilun Ding.

J. Mechanisms Robotics 11(4), 041009 (May 17, 2019) (14 pages) Paper No: JMR-18-1182; doi: 10.1115/1.4043600 History: Received June 20, 2018; Accepted April 16, 2019

A micropump sucker employs a gas film micropump to produce a negative pressure adhesion in a suction cup. In this study, a piezo-driven flexible actuator was developed based on a bridge-type mechanism as a vibrator for such a micropump film. The model of the flexible actuator under an external load is built based on an elastic model, and the displacement, driving force, and work efficiency are formulated in terms of the external loads, materials, and geometric parameters. The finite element method was used to verify this analytical model. An increase in the compliance of flexure hinges was found to improve the performances of the flexible actuator. The Young’s modulus of materials decides force performances and the effects of external loads. Based on the elastic analysis, the proposed flexible mechanism, made of silicon, was optimized to realize optimal output displacement in a compact size and employed in the prototype of a micropump sucker with a weight of 1.3 g that produced a maximum negative pressure of 2.45 kPa. It can hold on a weight of 1.4 g. When the inlet of the proposed sucker is open, it has the maximum flow rate of 4 ml/min.

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Figures

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Fig. 1

Schematics of the developed micropump sucker

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Fig. 2

Operating procedure of the micropump sucker

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Fig. 3

Schematic view of the flexure hinge

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Fig. 4

Schematic of the deformed flexible mechanism

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Fig. 5

Skeleton of the flexible mechanism

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Fig. 6

Schematic view of the flexible linkage

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Fig. 7

Schematic view of the bridge arm

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Fig. 8

Effects of various external loads on displacement characteristics

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Fig. 9

Effects of various external loads on the driving force

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Fig. 10

Effects of various external loads on work efficiency

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Fig. 11

Effects of materials on output displacement

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Fig. 12

Effects of materials on driving force

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Fig. 13

Effects of materials on work efficiency

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Fig. 14

Effects of geometric parameters on output displacement

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Fig. 15

Effects of geometric parameters on driving force

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Fig. 16

Effects of geometric parameters on preload force

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Fig. 17

Effects of geometric parameters on work efficiency

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Fig. 18

Prototypes of the flexible mechanisms and the flexible actuator

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Fig. 19

Prototype of the flexible actuator and its experimental setup

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Fig. 20

Output displacement versus different driving voltages: (a) comparison of the analytical results and (b) experimental results

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Fig. 21

Prototype of the micropump sucker

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Fig. 22

Experiment of the negative pressure: (a) experimental platform and (b) assembly method

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Fig. 23

Negative pressure of the suction cup

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Fig. 24

Negative pressure at a frequency of 13.2 kHz

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Fig. 25

Demonstration of adsorption of the micropump sucker

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Fig. 26

Total current at various driving frequencies

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Fig. 27

Experimental platform for the flow rate of the micropump

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Fig. 28

Flow rate of the inlet of the micropump

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