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Keywords: microelectrostatic device
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Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Research Papers
J. Appl. Mech. May 2011, 78(3): 031003.
Published Online: February 1, 2011
...Cha’o-Kuang Chen; Chin-Chia Liu; Hsin-Yi Lai Analyzing the dynamic behavior of microelectrostatic devices is problematic due to the complexity of the interactions between the electrostatic coupling effect, the fringing field effect, the residual stress, the tensile stress, and the nonlinear...
