Thermoelastic damping (TED) has been recognized as a significant mechanism of energy loss in vacuum-operated microresonators. Three-layered microbeams are common elements in many microresonators. However, only the model for TED in the three-layered microbeams with symmetric structure has been developed in the past. The first and the third layers in these beams have the same thickness and material properties. Thus, the temperature field is symmetric in these beams. In this paper, an analytical expression for TED in the asymmetric three-layered microbeams is developed in the form of an infinite series. The temperature fields in the asymmetric three-layered microbeams are asymmetric. The total damping is obtained by computing the energy dissipated in each layer. It is seen that the values for TED computed by the present model agree well with those computed by the finite-element model. The limitations of the present model are assessed. A simple model is also presented by retaining only the first term. The accuracy of the simple model is also discussed. The present model can be used to optimize the design of three-layered microbeams.
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June 2016
Research-Article
Thermoelastic Damping in Asymmetric Three-Layered Microbeam Resonators
Wanli Zuo,
Wanli Zuo
School of Mechanical Engineering,
Southeast University,
Nanjing 211189, China
Southeast University,
Nanjing 211189, China
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Yuming Fang,
Yuming Fang
College of Electronic Science and Engineering,
Nanjing University of Posts and Telecommunications,
Nanjing 210023, China
Nanjing University of Posts and Telecommunications,
Nanjing 210023, China
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Jianrun Zhang
Jianrun Zhang
School of Mechanical Engineering,
Southeast University,
Nanjing 211189, China
Southeast University,
Nanjing 211189, China
Search for other works by this author on:
Wanli Zuo
School of Mechanical Engineering,
Southeast University,
Nanjing 211189, China
Southeast University,
Nanjing 211189, China
Pu Li
Yuming Fang
College of Electronic Science and Engineering,
Nanjing University of Posts and Telecommunications,
Nanjing 210023, China
Nanjing University of Posts and Telecommunications,
Nanjing 210023, China
Jianrun Zhang
School of Mechanical Engineering,
Southeast University,
Nanjing 211189, China
Southeast University,
Nanjing 211189, China
1Corresponding author.
Contributed by the Applied Mechanics Division of ASME for publication in the JOURNAL OF APPLIED MECHANICS. Manuscript received August 8, 2015; final manuscript received March 3, 2016; published online March 28, 2016. Assoc. Editor: George Kardomateas.
J. Appl. Mech. Jun 2016, 83(6): 061002 (15 pages)
Published Online: March 28, 2016
Article history
Received:
August 8, 2015
Revised:
March 3, 2016
Citation
Zuo, W., Li, P., Fang, Y., and Zhang, J. (March 28, 2016). "Thermoelastic Damping in Asymmetric Three-Layered Microbeam Resonators." ASME. J. Appl. Mech. June 2016; 83(6): 061002. https://doi.org/10.1115/1.4032919
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