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Keywords: capillary-fed boiling
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Proceedings Papers
Farid Soroush, Tanya Liu, Qianying Wu, Chi Zhang, Mehdi Asheghi, Kenneth E. Goodson, Lorenz Marco, Egger Christian, Rittner Martin
Proc. ASME. InterPACK2021, ASME 2021 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, V001T05A001, October 26–28, 2021
Paper No: IPACK2021-73309
..., the heater and the RTD sensors are fabricated over a Silicon chip using the conventional Keywords: hybrid porous structures, capillary-fed boiling, micro fabrication processes and the micro porous copper micro porous copper film is deposited based on template-assisted V001T05A001-1 Copyright © 2021 by ASME...
