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Keywords: capillary-fed boiling
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Proceedings Papers

Proc. ASME. InterPACK2021, ASME 2021 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, V001T05A001, October 26–28, 2021
Paper No: IPACK2021-73309
..., the heater and the RTD sensors are fabricated over a Silicon chip using the conventional Keywords: hybrid porous structures, capillary-fed boiling, micro fabrication processes and the micro porous copper micro porous copper film is deposited based on template-assisted V001T05A001-1 Copyright © 2021 by ASME...