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Keywords: ultra-thin ta-C film
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Proceedings Papers

Proc. ASME. IMECE2006, Tribology, 9-21, November 5–10, 2006
Paper No: IMECE2006-14412
.... As the film thickness increases the relative intensity ratio ID/IG decreases, which means that sp3 bond in the films increases. The oxide layer cleaning procedure of silicon substrate before deposition influences the growth mode and surface roughness of the films. The ultra-thin ta-C film has the lowest...