1-1 of 1
Keywords: ultra-thin ta-C film
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Proc. ASME. IMECE2006, Tribology, 9-21, November 5–10, 2006
Paper No: IMECE2006-14412
.... As the film thickness increases the relative intensity ratio ID/IG decreases, which means that sp3 bond in the films increases. The oxide layer cleaning procedure of silicon substrate before deposition influences the growth mode and surface roughness of the films. The ultra-thin ta-C film has the lowest...