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Keywords: electrostatic actuatorClose
Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 29-34, November 11–16, 2001
Paper No: IMECE2001/MEMS-23804
...Abstract Abstract This study intends to improve the performances of conventional electrostatic actuator regarding its amplitude and driving force. Two approaches including the oblique-comb actuator design and 2-DOF vibration system for amplitude amplification are proposed. The former has...