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Proceedings Papers

Resistance of Liquid Metal Droplets Against Actuation on Microstructured Surfaces

Wenjiang Shen, Joonwon Kim, Chang-Jin “CJ” Kim

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 215-220, November 11–16, 2001

Paper No: IMECE2001/MEMS-23831

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23831

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Topics: Drops, Liquid metals, Microelectromechanical systems

Proceedings Papers

Splitting a Liquid Droplet for Electrowetting-Based Microfluidics

Sung Kwon Cho, Hyejin Moon, Jesse Fowler, Chang-Jin “CJ” Kim

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 207-213, November 11–16, 2001

Paper No: IMECE2001/MEMS-23830

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23830

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Topics: Drops, Microelectromechanical systems, Microfluidics

Proceedings Papers

Microscale Liquid Impingement Cooling

Lian Zhang, Evelyn N. Wang, Jon D. Koch, Jonathan T. C. Liu, Jae-Mo Koo, Linan Jiang, Kenneth E. Goodson, Juan G. Santiago, Thomas W. Kenny

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 135-140, November 11–16, 2001

Paper No: IMECE2001/MEMS-23820

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23820

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Topics: Impingement cooling, Microelectromechanical systems, Microscale devices, Jets, Water, Computer cooling, Flow (Dynamics), Heat flux, Heat transfer coefficients, Orifices

Proceedings Papers

Micromechanical Clamps for Optical Fiber Packaging of High Aspect Ratio MEMS Devices

Michael A. Beamesderfer, Ed Litcher, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 71-75, November 11–16, 2001

Paper No: IMECE2001/MEMS-23810

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23810

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Topics: Microelectromechanical systems, Optical fiber, Packaging, Clamps (Tools), Fibers, Design, Nickel, Silicon, Cantilever beams, Cantilevers

Proceedings Papers

Modeling and Simulating MEMS Devices Using Finite Element Analysis

Ulises Gonzalez

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 9-13, November 11–16, 2001

Paper No: IMECE2001/MEMS-23801

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23801

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Topics: Finite element analysis, Microelectromechanical systems, Modeling, Computer software, Dimensions, Mechanical behavior, Design, Electromagnetic force, Electromagnetism, Electrostatics

Proceedings Papers

Temperature-Dependent Property Effects on Laminar Flow Characteristics in a Rectangular Microchannel

Ho Joon Park, Sang Young Son, Mun Cheol Choi, Geunbae Lim, In-Seob Song, James Jungho Pak

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 443-448, November 11–16, 2001

Paper No: IMECE2001/MEMS-23865

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23865

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Topics: Laminar flow, Microchannels, Microelectromechanical systems, Temperature, Flow (Dynamics), Fluids, Pressure drop, Resistance thermometers, Dimensions, Heat flux

Proceedings Papers

MEMS Metrology Using Resonant Structures

A. Miller Allen, George C. Johnson

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 229-231, November 11–16, 2001

Paper No: IMECE2001/MEMS-23833

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23833

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Topics: Metrology, Microelectromechanical systems, Resonance, Geometry, Materials properties, Micromachining

Proceedings Papers

Operating Frequency of Thin Film NiTi in Fluid Media

Daniel D. Shin, Gregory P. Carman

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 221-227, November 11–16, 2001

Paper No: IMECE2001/MEMS-23832

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23832

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Topics: Fluids, Microelectromechanical systems, Nickel titanium alloys, Thin films

Proceedings Papers

Surface Micromachined Electrothermal V-Beam Micromotors

David S. Schreiber, Wei-Jen Cheng, John M. Maloney, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 141-147, November 11–16, 2001

Paper No: IMECE2001/MEMS-23821

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23821

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Topics: Microelectromechanical systems, Micromachining, Micromotors, Microactuators, Displacement, Engine design, Engines, Motors, Polysilicon, Reliability

Proceedings Papers

Tunable Phase Grating Using CMOS Processes

Yu-Sheng Yang, Cheng-Hsien Liu, Bruce C. S. Chou

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 77-82, November 11–16, 2001

Paper No: IMECE2001/MEMS-23811

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23811

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Topics: Complementary metal oxide semiconductors, Diffraction gratings, Microelectromechanical systems, Design, Aluminum, Dry etching, Electrodes, Electrostatic actuators, Modeling, Reactive-ion etching

Proceedings Papers

A New Assembly-Transferred Microwave Switch With Suspended CMOS-Compatible Coplanar Waveguides

Jen-Yi Chen, Long-Sun Huang, Chia-Hua Chu, I-Yin Li, Yao-Hui Kuo, Peizen Chang

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 65-69, November 11–16, 2001

Paper No: IMECE2001/MEMS-23809

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23809

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Topics: Complementary metal oxide semiconductors, Manufacturing, Microelectromechanical systems, Microwaves, Switches, Waveguides, Microassembling, Micromachining, Resonance, Transmission lines

Proceedings Papers

Development of a Program for Predicting Residual Stress Distribution in Multi-Stacked Film

Hyeon Chang Choi, Jun Hyub Park, Yong Soo Park

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 311-317, November 11–16, 2001

Paper No: IMECE2001/MEMS-23845

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23845

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Topics: Microelectromechanical systems, Stress concentration, Finite element methods, Semiconductor wafers, Deflection, Stress, Cantilever beams, Finite element analysis, Microcantilevers, Micromachining

Proceedings Papers

Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors

Frederick F. Rosenberger, III, David S. Schreiber, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 303-309, November 11–16, 2001

Paper No: IMECE2001/MEMS-23844

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23844

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Topics: Fibers, Interferometers, Microelectromechanical systems, Micromachining, Strain sensors, Design, Mirrors, Cavities, Micromotors, Optical fiber

Proceedings Papers

Stress Relaxation of Gold/Polysilicon Layered MEMS Microstructures Subjected to Thermal Loading

Yanhang Zhang, Martin L. Dunn

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 149-156, November 11–16, 2001

Paper No: IMECE2001/MEMS-23822

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23822

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Topics: Microelectromechanical systems, Polysilicon, Relaxation (Physics), Stress, Temperature, Cooling, Creep, Cycles, Deformation, Microelectronic devices

Proceedings Papers

A Magnetically Actuated, Electrostatically Clamped High Current MEMS Switch

Yoonsu Choi, Kieun Kim, Mark G. Allen

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 83-87, November 11–16, 2001

Paper No: IMECE2001/MEMS-23812

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23812

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Topics: Microelectromechanical systems, Switches, Magnetic fields, Currents, Electrodes, Transients (Dynamics)

Proceedings Papers

A Wafer Transfer Technology for MEMS Adaptive Optics

Eui-Hyeok Yang, Dean V. Wiberg

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 51-55, November 11–16, 2001

Paper No: IMECE2001/MEMS-23807

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23807

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Topics: Microelectromechanical systems, Optics, Semiconductor wafers, Membranes, Mirrors, Actuators, Epoxy adhesives, Epoxy resins, Manufacturing, Photoresists

Proceedings Papers

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Gary O’Brien, Xing Cheng, L. J. Guo

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 427-431, November 11–16, 2001

Paper No: IMECE2001/MEMS-23863

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23863

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Topics: Chemistry, Cycles, Etching, Lithography, Microelectromechanical systems, Plasmas (Ionized gases), Reactive-ion etching, Semiconductor wafers, Silicon

Proceedings Papers

Surface Micro-Machined Mirrors Using Simple Floating and Fixed Hinge Designs for Three-Layer Process

Alpha Mahatvaraj, Nirav D. Vora, Jimmy Bush, Glenn Cunningham, Joseph J. Biernacki, Jeffrey Frolik

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 419-426, November 11–16, 2001

Paper No: IMECE2001/MEMS-23862

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23862

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Topics: Hinges, Microelectromechanical systems, Micromachining, Mirrors, Stress, Lasers, Manufacturing, Engineering simulation, Fibers, Geometry

Proceedings Papers

Modeling and Optimization of a High Sensitivity Out-of-Plane Microgyroscope

Shifeng Li, Shaochen Chen

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 297-302, November 11–16, 2001

Paper No: IMECE2001/MEMS-23843

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23843

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Topics: Microelectromechanical systems, Microgyroscopes, Modeling, Optimization, Design, Dynamic models, Finite element methods, Finite element model, Mode shapes, Topology

Proceedings Papers

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

John M. Maloney, David S. Schreiber, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 289-296, November 11–16, 2001

Paper No: IMECE2001/MEMS-23842

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23842

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Topics: Crystals, Microelectromechanical systems, Micromotors, Reactive-ion etching, Silicon, Motors, Actuators, Silicon-on-insulator, Clamps (Tools), Compliant mechanisms

2 3 4

NARROW

Resistance of Liquid Metal Droplets Against Actuation on Microstructured Surfaces

Splitting a Liquid Droplet for Electrowetting-Based Microfluidics

Microscale Liquid Impingement Cooling

Micromechanical Clamps for Optical Fiber Packaging of High Aspect Ratio MEMS Devices

Modeling and Simulating MEMS Devices Using Finite Element Analysis

Temperature-Dependent Property Effects on Laminar Flow Characteristics in a Rectangular Microchannel

MEMS Metrology Using Resonant Structures

Operating Frequency of Thin Film NiTi in Fluid Media

Surface Micromachined Electrothermal V-Beam Micromotors

Tunable Phase Grating Using CMOS Processes

A New Assembly-Transferred Microwave Switch With Suspended CMOS-Compatible Coplanar Waveguides

Development of a Program for Predicting Residual Stress Distribution in Multi-Stacked Film

Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors

Stress Relaxation of Gold/Polysilicon Layered MEMS Microstructures Subjected to Thermal Loading

A Magnetically Actuated, Electrostatically Clamped High Current MEMS Switch

A Wafer Transfer Technology for MEMS Adaptive Optics

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Surface Micro-Machined Mirrors Using Simple Floating and Fixed Hinge Designs for Three-Layer Process

Modeling and Optimization of a High Sensitivity Out-of-Plane Microgyroscope

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

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