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Proceedings Papers

High Resolution Single Crystal Silicon Accelerometer Using Silicon Fusion Bonding and Deep Reactive Ion Etching

B. P. van Drieënhuizen, N. I. Maluf

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 9-12, November 16–21, 1997

Paper No: IMECE1997-0931

DOI: https://doi.org/10.1115/IMECE1997-0931

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Topics: Accelerometers, Bonding, Crystals, Reactive-ion etching, Resolution (Optics), Silicon, Noise (Sound), Complementary metal oxide semiconductors, Brownian motion, Electronics

Proceedings Papers

Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges

Quanfang Chen, Da-Jeng Yao, Chang-Jin “CJ” Kim, Greg P. Carman

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 413-420, November 15–20, 1998

Paper No: IMECE1998-1278

DOI: https://doi.org/10.1115/IMECE1998-1278

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Topics: Crystal structure, Manufacturing, Silicon, Chemical etching, Crystals, Reactive-ion etching, Dry etching, Anisotropy, Shear (Mechanics), Shear strength

Proceedings Papers

Viscous Effects in Supersonic MEMS-Fabricated Micronozzles

Robert L. Bayt, Kenneth S. Breuer

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 117-123, November 15–20, 1998

Paper No: IMECE1998-1231

DOI: https://doi.org/10.1115/IMECE1998-1231

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Topics: Microelectromechanical systems, Micronozzles, Nozzles, Reynolds number, Thrust, Boundary layers, Computer simulation, Errors, Flow (Dynamics), Fluids

Proceedings Papers

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

Junghoon Lee, Chang-Jin “CJ” Kim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 475-480, November 15–20, 1998

Paper No: IMECE1998-1287

DOI: https://doi.org/10.1115/IMECE1998-1287

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Topics: Reactive-ion etching, Silicon, Electrolytes, Liquid metals, Microchannels, Microelectromechanical systems, Microscale devices, Slug flows, Surface tension, Design

Proceedings Papers

Correlation of Fracture Initiation for Microscale Structures: Free-Standing Silicon and Silicon/Glass Interfaces

Martin L. Dunn, Wan Suwito, Paul E. W. Labossiere, Shawn J. Cunningham

Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 157, November 15–20, 1998

Paper No: IMECE1998-1154

DOI: https://doi.org/10.1115/IMECE1998-1154

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Topics: Fracture (Materials), Fracture (Process), Glass, Microscale devices, Silicon, Stress, Etching, Semiconductor wafers, Anisotropy, Bending (Stress)

Proceedings Papers

An Electrochemically Actuated Micro Dosing System With Improved Dosing Control

Sebastian Böhm, Wouter Olthuis, Piet Bergveld

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 391-395, November 14–19, 1999

Paper No: IMECE1999-0296

DOI: https://doi.org/10.1115/IMECE1999-0296

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Topics: Actuators, Borosilicate glasses, Bubbles, Electrodes, Electrolysis, Electrolytes, Fluids, Hydrogen, Microelectromechanical systems, Micromachining

Proceedings Papers

Drag Reduction on Microscale Concave-Convex Surface

Masato Hasegawa, Hideki Nariai, Kazufumi Kaneko, Hiroshi Maki, Akira Yabe, Sohei Matsumoto

Proc. ASME. IMECE99, Heat Transfer: Volume 1, 317-322, November 14–19, 1999

Paper No: IMECE1999-0999

DOI: https://doi.org/10.1115/IMECE1999-0999

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Topics: Drag reduction, Microscale devices, Filters, Friction, Reactive-ion etching, Reynolds number, Bubbles, Coating processes, Coatings, Drops

Proceedings Papers

Design and Fabrication of a Silicon-Based MEMS Rotary Engine

Kelvin Fu, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 875-880, November 11–16, 2001

Paper No: IMECE2001/MEMS-23925

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23925

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Topics: Design, Engines, Manufacturing, Microelectromechanical systems, Silicon, Rotors, Density, Energy / power systems, Etching, Geometry

Proceedings Papers

Through-Wafer Electrical Interconnects for MEMS Sensors

Venkataraman Chandrasekaran, Eugene M. Chow, Thomas W. Kenny, Toshikazu Nishida, Mark Sheplak

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 319-324, November 11–16, 2001

Paper No: IMECE2001/MEMS-23846

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23846

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Topics: Microelectromechanical systems, Semiconductor wafers, Sensors, Capacitance, Manufacturing, Noise (Sound), Polysilicon, Silicon, Boron, Heat conduction

Proceedings Papers

Tunable Phase Grating Using CMOS Processes

Yu-Sheng Yang, Cheng-Hsien Liu, Bruce C. S. Chou

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 77-82, November 11–16, 2001

Paper No: IMECE2001/MEMS-23811

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23811

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Topics: Complementary metal oxide semiconductors, Diffraction gratings, Microelectromechanical systems, Design, Aluminum, Dry etching, Electrodes, Electrostatic actuators, Modeling, Reactive-ion etching

Proceedings Papers

Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors

Frederick F. Rosenberger, III, David S. Schreiber, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 303-309, November 11–16, 2001

Paper No: IMECE2001/MEMS-23844

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23844

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Topics: Fibers, Interferometers, Microelectromechanical systems, Micromachining, Strain sensors, Design, Mirrors, Cavities, Micromotors, Optical fiber

Proceedings Papers

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Gary O’Brien, Xing Cheng, L. J. Guo

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 427-431, November 11–16, 2001

Paper No: IMECE2001/MEMS-23863

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23863

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Topics: Chemistry, Cycles, Etching, Lithography, Microelectromechanical systems, Plasmas (Ionized gases), Reactive-ion etching, Semiconductor wafers, Silicon

Proceedings Papers

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

John M. Maloney, David S. Schreiber, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 289-296, November 11–16, 2001

Paper No: IMECE2001/MEMS-23842

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23842

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Topics: Crystals, Microelectromechanical systems, Micromotors, Reactive-ion etching, Silicon, Motors, Actuators, Silicon-on-insulator, Clamps (Tools), Compliant mechanisms

Proceedings Papers

Design and Fabrication of a Silicon-Based MEMS Rotary Engine

Kelvin Fu, Aaron J. Knobloch, Fabian C. Martinez, David C. Walther, Carlos Fernandez-Pello, Al P. Pisano, Dorian Liepmann

Proc. ASME. IMECE2001, Advanced Energy Systems, 303-308, November 11–16, 2001

Paper No: IMECE2001/AES-23636

DOI: https://doi.org/10.1115/IMECE2001/AES-23636

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Topics: Design, Engines, Manufacturing, Microelectromechanical systems, Silicon, Rotors, Density, Energy / power systems, Etching, Geometry

Proceedings Papers

Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers

Meng-Nian Niu, Eun Sok Kim

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 269-274, November 5–10, 2000

Paper No: IMECE2000-1102

DOI: https://doi.org/10.1115/IMECE2000-1102

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Microelectromechanical systems, Pressure transducers, Stress, Microphones, Displacement, Reactive-ion etching, Compressive stress, Etching

Proceedings Papers

Analysis and Design of Electrothermal Actuators Fabricated From Single Crystal Silicon

John M. Maloney, Don L. DeVoe, David S. Schreiber

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 233-240, November 5–10, 2000

Paper No: IMECE2000-1097

DOI: https://doi.org/10.1115/IMECE2000-1097

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Topics: Actuators, Crystals, Design, Silicon, Silicon-on-insulator, Deflection, Euler-Bernoulli beam theory, Heat conduction, Heating, Manganese (Metal)

Proceedings Papers

Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases

Stephen E. Vargo, Amanda A. Green, E. P. Muntz

Proc. ASME. IMECE2000, Heat Transfer: Volume 2, 307-314, November 5–10, 2000

Paper No: IMECE2000-1440

DOI: https://doi.org/10.1115/IMECE2000-1440

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Topics: Gases, Heat transfer, Microelectromechanical systems, Transpiration, Vacuum pumps, Compressors, Instrumentation, Contamination, Engineering simulation, Flow (Dynamics)

Proceedings Papers

Design, Analysis and Fabrication of a Meso-Scale Centrifugal Compressor

A. Laveau, J. S. Kapat, L. C. Chow, E. Enikov, K. B. Sundaram

Proc. ASME. IMECE2000, Advanced Energy Systems, 129-137, November 5–10, 2000

Paper No: IMECE2000-1305

DOI: https://doi.org/10.1115/IMECE2000-1305

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Topics: Compressors, Design, Manufacturing, Blades, Flow (Dynamics), Impellers, Semiconductor wafers, Stators, Vapors, Borosilicate glasses

Proceedings Papers

Data-Based Modeling for Reactive Ion Etching: Effectiveness of an Artificial Neural Network Model for Estimating Tungsten Silicon Nitride Etch Rate

Madeline A. Walters, Zhaoyan Fan, Burak Sencer

Proc. ASME. IMECE2020, Volume 2B: Advanced Manufacturing, V02BT02A034, November 16–19, 2020

Paper No: IMECE2020-23992

DOI: https://doi.org/10.1115/IMECE2020-23992

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Topics: Artificial neural networks, Etching, Modeling, Reactive-ion etching, Silicon nitride ceramics, Tungsten

Proceedings Papers

Thermal Performance of Asymmetrical Saw-Toothed Microchannels With Phase Change

Le Gao, James M. Pool, Sushil H. Bhavnani

Proc. ASME. IMECE2016, Volume 8: Heat Transfer and Thermal Engineering, V008T10A092, November 11–17, 2016

Paper No: IMECE2016-66240

DOI: https://doi.org/10.1115/IMECE2016-66240

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Topics: Microchannels, Boiling, Flow (Dynamics), Heat, Heat sinks, Semiconductor wafers, Boundary-value problems, Computer technology, Cooling, Copper

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NARROW

High Resolution Single Crystal Silicon Accelerometer Using Silicon Fusion Bonding and Deep Reactive Ion Etching

Influence of Fabrication and Crystal Orientation on the Strength of Silicon Microridges

Viscous Effects in Supersonic MEMS-Fabricated Micronozzles

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

Correlation of Fracture Initiation for Microscale Structures: Free-Standing Silicon and Silicon/Glass Interfaces

An Electrochemically Actuated Micro Dosing System With Improved Dosing Control

Drag Reduction on Microscale Concave-Convex Surface

Design and Fabrication of a Silicon-Based MEMS Rotary Engine

Through-Wafer Electrical Interconnects for MEMS Sensors

Tunable Phase Grating Using CMOS Processes

Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors

Deep Reactive Ion Etched Submicron Beam/Trench Characterization

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

Design and Fabrication of a Silicon-Based MEMS Rotary Engine

Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers

Analysis and Design of Electrothermal Actuators Fabricated From Single Crystal Silicon

Heat Transfer Implications in the First MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases

Design, Analysis and Fabrication of a Meso-Scale Centrifugal Compressor

Data-Based Modeling for Reactive Ion Etching: Effectiveness of an Artificial Neural Network Model for Estimating Tungsten Silicon Nitride Etch Rate

Thermal Performance of Asymmetrical Saw-Toothed Microchannels With Phase Change

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