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Proceedings Papers

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

Junghoon Lee, Chang-Jin “CJ” Kim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 475-480, November 15–20, 1998

Paper No: IMECE1998-1287

DOI: https://doi.org/10.1115/IMECE1998-1287

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Topics: Reactive-ion etching, Silicon, Electrolytes, Liquid metals, Microchannels, Microelectromechanical systems, Microscale devices, Slug flows, Surface tension, Design

Proceedings Papers

Surface Micromachined Electrothermal V-Beam Micromotors

David S. Schreiber, Wei-Jen Cheng, John M. Maloney, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 141-147, November 11–16, 2001

Paper No: IMECE2001/MEMS-23821

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23821

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Topics: Microelectromechanical systems, Micromachining, Micromotors, Microactuators, Displacement, Engine design, Engines, Motors, Polysilicon, Reliability

Proceedings Papers

Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors

Frederick F. Rosenberger, III, David S. Schreiber, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 303-309, November 11–16, 2001

Paper No: IMECE2001/MEMS-23844

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23844

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Topics: Fibers, Interferometers, Microelectromechanical systems, Micromachining, Strain sensors, Design, Mirrors, Cavities, Micromotors, Optical fiber

Proceedings Papers

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

John M. Maloney, David S. Schreiber, Don L. DeVoe

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 289-296, November 11–16, 2001

Paper No: IMECE2001/MEMS-23842

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23842

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Topics: Crystals, Microelectromechanical systems, Micromotors, Reactive-ion etching, Silicon, Motors, Actuators, Silicon-on-insulator, Clamps (Tools), Compliant mechanisms

Proceedings Papers

Modeling of an Elastic Fin Micromotor

P. Lu, K. H. Lee, S. P. Lim, S. Dong, W. Z. Lin

Proc. ASME. IMECE2000, Dynamics, Acoustics and Simulations, 185-192, November 5–10, 2000

Paper No: IMECE2000-2198

DOI: https://doi.org/10.1115/IMECE2000-2198

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Topics: Micromotors, Modeling, Rotors, Motors, Stators, Cycles, Deformation, Equations of motion, Separation (Technology), Vibration

Proceedings Papers

Packaging Technology for MEMS

Qing Tan

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 637-644, November 5–10, 2000

Paper No: IMECE2000-1157

DOI: https://doi.org/10.1115/IMECE2000-1157

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Topics: Microelectromechanical systems, Packaging, Ceramics, Plastics, Biomedicine, Circuits, Fuel cells, Lasers, Machining, Manufacturing

Proceedings Papers

Design, Fabrication and Testing of Laterally Driven Electrostatic Motors Employing Walking Motion and Mechanical Leverage

N. R. Tas, R. Molenaar, T. Sonnenberg, J. P. Baartman, M. P. Koster, M. Elwenspoek

Proc. ASME. IMECE2000, Micro-Electro-Mechanical Systems (MEMS), 169-176, November 5–10, 2000

Paper No: IMECE2000-1088

DOI: https://doi.org/10.1115/IMECE2000-1088

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Topics: Design, Manufacturing, Motors, Testing, Levers, Manganese (Metal), Microelectromechanical systems, Micromotors

Proceedings Papers

Teaching Classical Control System Course With Portable Student-Owned Mechatronic Kits

Eniko T. Enikov, Estelle Eke

Proc. ASME. IMECE2012, Volume 5: Education and Globalization; General Topics, 509-516, November 9–15, 2012

Paper No: IMECE2012-86700

DOI: https://doi.org/10.1115/IMECE2012-86700

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Topics: Control systems, Students, Teaching, Carbon fibers, Control equipment, Matlab, Mechanical engineering, Modeling, Computers, Deflection

Proceedings Papers

An Admittance Type Haptic Device: RML Glove

Zhou Ma, Pinhas Ben-Tzvi

Proc. ASME. IMECE2011, Volume 7: Dynamic Systems and Control; Mechatronics and Intelligent Machines, Parts A and B, 1219-1225, November 11–17, 2011

Paper No: IMECE2011-64108

DOI: https://doi.org/10.1115/IMECE2011-64108

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Topics: Haptics, Mechanical admittance, Force feedback, Actuators, Robots, Control equipment, Design, Hardware, Lithium-ion batteries, Micromotors

Proceedings Papers

Hardware Demonstration of Classical Undergraduate Control Design Methods Using MATLAB Real-Time Windows Target Environment

Eniko T. Enikov, Vasco Polyzoev, Joshua Gill

Proc. ASME. IMECE2011, Volume 5: Engineering Education and Professional Development, 21-27, November 11–17, 2011

Paper No: IMECE2011-62491

DOI: https://doi.org/10.1115/IMECE2011-62491

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Topics: Design methodology, Hardware, Matlab, Undergraduate students, Students, Control systems, Design, Micromotors, Carbon fibers, Control panels

Proceedings Papers

Effects of Miniaturisation on Electromagnetic Motors for Micro Mechatronic Systems

Samir Mekid

Proc. ASME. IMECE2010, Volume 10: Micro and Nano Systems, 177-183, November 12–18, 2010

Paper No: IMECE2010-38651

DOI: https://doi.org/10.1115/IMECE2010-38651

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Topics: Motors, Micromotors, Torque, Friction, Inertia (Mechanics), Rotation

Proceedings Papers

Nanometer Range Closed-Loop Control of a Stepper Micro-Motor for Data Storage

Mihai Patrascu, Stefano Stramigioli, Meint de Boer, Gijs Krijnen

Proc. ASME. IMECE2007, Volume 11: Micro and Nano Systems, Parts A and B, 209-217, November 11–15, 2007

Paper No: IMECE2007-42890

DOI: https://doi.org/10.1115/IMECE2007-42890

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Topics: Data storage systems, Microelectromechanical systems, Micromotors, Wafer steppers

Proceedings Papers

A Novel Embedded Root Method to Construct Thick Metal Microstructures Using SU-8 in UV-LIGA Process

Chien-Hung Ho, Kan-Ping Chin

Proc. ASME. IMECE2002, Microelectromechanical Systems, 359-363, November 17–22, 2002

Paper No: IMECE2002-33391

DOI: https://doi.org/10.1115/IMECE2002-33391

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Topics: Metals, Micromotors, Ultraviolet radiation, Manufacturing, Microelectromechanical systems, Stators, Strips, Adhesion, Bearings, Construction

Proceedings Papers

Polysilicon Failure Stress and Young’s Modulus Evaluation in MEMS Devices

Fabio Carli, Rossana Cambie, Benedetto Vigna, Chantal Combi

Proc. ASME. IMECE2003, Microelectromechanical Systems, 1-6, November 15–21, 2003

Paper No: IMECE2003-41157

DOI: https://doi.org/10.1115/IMECE2003-41157

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Topics: Failure, Microelectromechanical systems, Polysilicon, Stress, Young's modulus, Actuators, Elastic moduli, Electric potential, Micromachining, Micromotors

NARROW

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

Surface Micromachined Electrothermal V-Beam Micromotors

Micromachined Fabry-Perot Interferometers for the Demodulation of Fiber Optic Strain Sensors

Electrothermal Linear Micromotors Fabricated From Deep Reactive Ion Etching of Single Crystal Silicon

Modeling of an Elastic Fin Micromotor

Packaging Technology for MEMS

Design, Fabrication and Testing of Laterally Driven Electrostatic Motors Employing Walking Motion and Mechanical Leverage

Teaching Classical Control System Course With Portable Student-Owned Mechatronic Kits

An Admittance Type Haptic Device: RML Glove

Hardware Demonstration of Classical Undergraduate Control Design Methods Using MATLAB Real-Time Windows Target Environment

Effects of Miniaturisation on Electromagnetic Motors for Micro Mechatronic Systems

Nanometer Range Closed-Loop Control of a Stepper Micro-Motor for Data Storage

A Novel Embedded Root Method to Construct Thick Metal Microstructures Using SU-8 in UV-LIGA Process

Polysilicon Failure Stress and Young’s Modulus Evaluation in MEMS Devices

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