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Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A012, October 30–November 3, 2022

Paper No: IMECE2022-92967

DOI: https://doi.org/10.1115/IMECE2022-92967

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Topics: Etching, Flow (Dynamics), Reactive-ion etching, Silicon, Cooling, Cycles, Corners (Structural elements), Energy dissipation, Gas flow, Heat

Proceedings Papers

Flexible Energy Harvesters for Harsh Environments: A Review

Andrew Haskell, Seyed Soltani

Paper No: IMECE2022-95437

DOI: https://doi.org/10.1115/IMECE2022-95437

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Topics: Energy harvesting, Fatigue, Finite element analysis, Fracture (Materials), Microelectromechanical systems, Thin films

Proceedings Papers

Lateral and Transverse Movable Mass Impacts on Bandwidth of Kinetic Energy Harvesters

Nathan Jackson

Paper No: IMECE2022-94231

DOI: https://doi.org/10.1115/IMECE2022-94231

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Topics: Cantilevers, Energy harvesting, Kinetic energy, Microelectromechanical systems, Nonlinear dynamics, Q-factor

Proceedings Papers

Batch Fabrication of Pneumatic Valve Arrays by Combining MEMS With Printed Circuit Board Technology

Patrick Cheung, Andrew A. Berlin, David K. Biegelsen, Warren B. Jackson

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 39-46, November 16–21, 1997

Paper No: IMECE1997-0937

DOI: https://doi.org/10.1115/IMECE1997-0937

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Topics: Manufacturing, Microelectromechanical systems, Pneumatic valves, Printed circuit boards, Valves, Actuators, Air flow, Air jets, Design, Flow (Dynamics)

Proceedings Papers

MEMS for Fluidic Controls

Chih-Ming Ho, Yu-Chong Tai

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 27, November 16–21, 1997

Paper No: IMECE1997-0934

DOI: https://doi.org/10.1115/IMECE1997-0934

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Topics: Microelectromechanical systems, Sensors, Actuators, Circuits, Shear stress, Transducers, Computers, Integrated circuit fabrication, Micromachining, Artificial neural networks

Proceedings Papers

Mechanical Testing of Thicker MEMS Materials

William N. Sharpe, Jr., David A. LaVan, Andrew McAleavey

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 93-97, November 16–21, 1997

Paper No: IMECE1997-0945

DOI: https://doi.org/10.1115/IMECE1997-0945

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Topics: Mechanical testing, Microelectromechanical systems, Nickel, Bulk solids, Electrodeposition, Stress-strain curves, Yield stress

Proceedings Papers

Strength and Fracture of Micromachined Silicon Structures

Wan Suwito, Martin L. Dunn, Shawn J. Cunningham

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 99-104, November 16–21, 1997

Paper No: IMECE1997-0946

DOI: https://doi.org/10.1115/IMECE1997-0946

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Topics: Fracture (Materials), Fracture (Process), Micromachining, Silicon, Corners (Structural elements), Design, Anisotropy, Chemical etching, Crystals, Manufacturing

Proceedings Papers

Digital Micromirror Device™: Commercialization of a Massively Parallel MEMS Technology

Larry J. Hornbeck, T. Russ Howell, Richard L. Knipe, Michael A. Mignardi

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 3-8, November 16–21, 1997

Paper No: IMECE1997-0930

DOI: https://doi.org/10.1115/IMECE1997-0930

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Topics: Microelectromechanical systems, Circuits, Complementary metal oxide semiconductors, Manufacturing, Reliability, Resolution (Optics), Switches

Proceedings Papers

Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom

Jan E. Vandemeer, Michael S. Kranz, Gary K. Fedder

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 113-118, November 16–21, 1997

Paper No: IMECE1997-0948

DOI: https://doi.org/10.1115/IMECE1997-0948

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Topics: Degrees of freedom, Microelectromechanical systems, Simulation, Design, Blocks (Building materials), Complex systems, Electrical properties, Electrostatic actuators, Signals

Proceedings Papers

Microgasketing and Room Temperature Wafer Joining for Liquid-Filled MEMS Devices

Jonathan Simon, Long-Sun Huang, Balaji Sridharan, Chang-Jin Kim

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 29-34, November 16–21, 1997

Paper No: IMECE1997-0935

DOI: https://doi.org/10.1115/IMECE1997-0935

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Topics: Joining, Microelectromechanical systems, Semiconductor wafers, Temperature, Adhesives, Low temperature, Reservoirs, Sealing (Process), Epoxy adhesives, Hardening (Curing)

Proceedings Papers

MEMS-Based Control of Structural Dynamic Instability

J. Geoffrey Chase, Mark Yim, Andrew A. Berlin, Brian. J. Maclean, Marc Olivier, Stephen C. Jacobsen

Proc. ASME. IMECE97, Adaptive Structures and Material Systems, 105-112, November 16–21, 1997

Paper No: IMECE1997-0183

DOI: https://doi.org/10.1115/IMECE1997-0183

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Topics: Microelectromechanical systems, Structural dynamics, Stress, Buckling, Actuators, Design, Sensors, Adaptive structures, Control systems, Engineering prototypes

Proceedings Papers

The Design and Analysis of Compliant MEMS Using the Pseudo-Rigid-Body Model

Brian D. Jensen, Larry L. Howell, Daniel B. Gunyan, Linton G. Salmon

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 119-126, November 16–21, 1997

Paper No: IMECE1997-0949

DOI: https://doi.org/10.1115/IMECE1997-0949

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Topics: Design, Microelectromechanical systems, Deflection, Compliant mechanisms, Euler-Bernoulli beam theory, Testing

Proceedings Papers

Advances in Tensile Testing of Polysilicon Thin Films

William N. Sharpe, Jr., Bin Yuan, Richard L. Edwards

Proc. ASME. IMECE97, Applications of Experimental Mechanics to Electronic Packaging, 113-116, November 16–21, 1997

Paper No: IMECE1997-1235

DOI: https://doi.org/10.1115/IMECE1997-1235

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Topics: Polysilicon, Tensile testing, Thin films, Testing, ASTM International, Mechanical properties, Displacement, Fracture (Materials), Fracture toughness, Mechanical testing

Proceedings Papers

A Surgeon’s Perspective on MEMS for Surgery

M. R. Treat

Proc. ASME. IMECE97, Advances in Bioengineering, 291, November 16–21, 1997

Paper No: IMECE1997-0343

DOI: https://doi.org/10.1115/IMECE1997-0343

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Topics: Microelectromechanical systems, Surgery, Sensors, Biological tissues, Cavities, Force feedback, Surgical tools, Carbon dioxide, Design, Fasteners

Proceedings Papers

MEMS Opportunities in the Automotive Industry

Ed Sickafus

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 589, November 15–20, 1998

Paper No: IMECE1998-1305

DOI: https://doi.org/10.1115/IMECE1998-1305

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Topics: Automotive industry, Microelectromechanical systems, Actuators, Automobiles, Reliability, Sensors

Proceedings Papers

Peristaltically Driven Flows for Micro-Mixers

Kiril P. Selverov, Howard A. Stone

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 85-88, November 15–20, 1998

Paper No: IMECE1998-1226

DOI: https://doi.org/10.1115/IMECE1998-1226

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Topics: Flow (Dynamics), Boundary layers, Containers, Fluids, Microelectromechanical systems, Modeling, Traveling waves

Proceedings Papers

A High Performance Hand-Held Gas Chromatograph

Conrad M. Yu, Matthew Lucas, Jackson C. Koo, Paul Stratton, Terri DeLima, Elaine Behymer

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 481-486, November 15–20, 1998

Paper No: IMECE1998-1288

DOI: https://doi.org/10.1115/IMECE1998-1288

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Topics: Gas chromatography, Microelectromechanical systems, Sensors, Ejectors, Separation (Technology), Batteries, Bridges (Structures), Computer software, Electrical measurement, Electricity (Physics)

Proceedings Papers

Automatic Model Order Reduction of a Microdevice Using the Arnoldi Approach

Frank Wang, Jacob White

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 527-530, November 15–20, 1998

Paper No: IMECE1998-1295

DOI: https://doi.org/10.1115/IMECE1998-1295

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Topics: Linear systems, Microelectromechanical systems, Simulation

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Simulating a Piezoelectric-Haptic MEMS Actuator in Low-Frequency Vibration

Electrostatically Actuated MEMS Cantilevers of Linear Thickness Variation: Amplitude-Frequency Response of Parametric Resonance

Effect of SF 6 and C 4 F 8 Flow Rate on Etched Surface Profile and Grass Formation in Deep Reactive Ion Etching Process

Flexible Energy Harvesters for Harsh Environments: A Review

Lateral and Transverse Movable Mass Impacts on Bandwidth of Kinetic Energy Harvesters

Batch Fabrication of Pneumatic Valve Arrays by Combining MEMS With Printed Circuit Board Technology

MEMS for Fluidic Controls

Mechanical Testing of Thicker MEMS Materials

Strength and Fracture of Micromachined Silicon Structures

Digital Micromirror Device™: Commercialization of a Massively Parallel MEMS Technology

Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom

Microgasketing and Room Temperature Wafer Joining for Liquid-Filled MEMS Devices

MEMS-Based Control of Structural Dynamic Instability

The Design and Analysis of Compliant MEMS Using the Pseudo-Rigid-Body Model

Advances in Tensile Testing of Polysilicon Thin Films

A Surgeon’s Perspective on MEMS for Surgery

MEMS Opportunities in the Automotive Industry

Peristaltically Driven Flows for Micro-Mixers

A High Performance Hand-Held Gas Chromatograph

Automatic Model Order Reduction of a Microdevice Using the Arnoldi Approach

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