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Proceedings Papers

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

Mu Chiao, Liwei Lin

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 75-80, November 16–21, 1997

Paper No: IMECE1997-0942

DOI: https://doi.org/10.1115/IMECE1997-0942

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Topics: Microactuators, Microbeams, Computers, Displacement, Image processing, Micromachining, Polysilicon, Thermoelasticity

Proceedings Papers

Blister-Like Local Buckling of Polysilicon Microbeams During Wet-Release

Xin Zhang, Yitshak Zohar, Tong-Yi Zhang

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 379-384, November 15–20, 1998

Paper No: IMECE1998-1272

DOI: https://doi.org/10.1115/IMECE1998-1272

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Topics: Buckling, Microbeams, Polysilicon, Drying, Manufacturing, Stress

Proceedings Papers

Low-Cycle Fatigue in Aluminum Microbeams

Richard P. Vinci

Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 139, November 15–20, 1998

Paper No: IMECE1998-1148

DOI: https://doi.org/10.1115/IMECE1998-1148

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Topics: Aluminum, Bulk solids, Fatigue failure, Low cycle fatigue, Microbeams, Microelectromechanical systems, Plasticity, Tensile strength, Thin films

Proceedings Papers

A Numerical Hybrid Finite Element Model for Lattice Structures Using 3D/Beam Elements

Ahmadali Tahmasebimoradi, Chetra Mang, Xavier Lorang

Proc. ASME. IMECE2021, Volume 2A: Advanced Manufacturing, V02AT02A061, November 1–5, 2021

Paper No: IMECE2021-69119

DOI: https://doi.org/10.1115/IMECE2021-69119

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Topics: Finite element model, Microbeams, Junctions, Additive manufacturing, Deformation, Engineering simulation, Plasticity, Shapes, Simulation, Surface roughness

Proceedings Papers

Investigations Into the Linear Coupling Between Symmetric and Anti-Symmetric Modes of V-Shaped MEMS Resonators Under Electrostatic Perturbation

Nouha Alcheikh, Hassen M. Ouakad, Sofiane Ben Mbarek, Mohammad I. Younis

Proc. ASME. IMECE2021, Volume 7A: Dynamics, Vibration, and Control, V07AT07A029, November 1–5, 2021

Paper No: IMECE2021-73535

DOI: https://doi.org/10.1115/IMECE2021-73535

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Topics: Arches, Electrodes, Microbeams, Microelectromechanical systems, Silicon, Vibration

Proceedings Papers

Modal Interaction in a Levitation Force MEMS Based Resonator

Mohammadreza Zamanzadeh, H. G. E. Meijer, Ilgar Jafarsadeghi-Pournaki, H. M. Ouakad

Proc. ASME. IMECE2021, Volume 7B: Dynamics, Vibration, and Control, V07BT07A064, November 1–5, 2021

Paper No: IMECE2021-72755

DOI: https://doi.org/10.1115/IMECE2021-72755

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Topics: Levitation, Microelectromechanical systems, Resonance, Microbeams, Electrodes, Bifurcation, Design, Attractors, Cantilevers, Eigenvalues

Proceedings Papers

Localized Deposition of Polysilicon for MEMS Post-Fabrication Processing

Daphne Joachim, Liwei Lin

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 37-42, November 14–19, 1999

Paper No: IMECE1999-0243

DOI: https://doi.org/10.1115/IMECE1999-0243

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Topics: Manufacturing, Microelectromechanical systems, Polysilicon, Microbeams, Finite element analysis, Sealing (Process), Silicon, Temperature

Proceedings Papers

A Novel Testing Machine for Characterization of Materials for MEMS Applications

Sauri Gudlavalleti, Lallit Anand

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 371-376, November 11–16, 2001

Paper No: IMECE2001/MEMS-23854

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23854

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Topics: Machinery, Materials characterization, Microelectromechanical systems, Testing, Thin films, Displacement, Aluminum, Copper foil, Fibers, Force measurement

Proceedings Papers

Low Temperature Eutectic Bonding for In-Plane Type Micro Thermoelectric Cooler

Da-Jeng Yao, Gang Chen, Chang-Jin “CJ” Kim

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 719-722, November 11–16, 2001

Paper No: IMECE2001/MEMS-23901

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23901

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Topics: Bonding, Low temperature, Microelectromechanical systems, Thermoelectric coolers, Cooling, Manufacturing, Microbeams, Silicon, Flow (Dynamics), High temperature

Proceedings Papers

Pirani Pressure Sensor With Distributed Temperature Sensing

J. J. van Baar, R. J. Wiegerink, T. S. J. Lammerink, G. J. M. Krijnen, M. Elwenspoek

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 115-122, November 11–16, 2001

Paper No: IMECE2001/MEMS-23817

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23817

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Topics: Microelectromechanical systems, Pressure sensors, Temperature, Microbeams, Pressure, Temperature distribution, Thermal conductivity, Heat losses, Heat sinks, Resistors

Proceedings Papers

Novel Bulk Acoustic Wave Hammer to Determinate the Dynamic Response of Microstructures Using Pulsed Broad Bandwidth Ultrasonic Transducers

Wen-Pin Lai, Yi-Ping Ho, Weileun Fang

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 199-206, November 11–16, 2001

Paper No: IMECE2001/MEMS-23829

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23829

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Topics: Acoustics, Dynamic response, Hammers, Microelectromechanical systems, Ultrasonic transducers, Waves, Damping, Excitation, Microbeams, Mode shapes

Proceedings Papers

A Macromodel for Dynamic Simulation of Microelectromechanical Systems

W. Z. Lin, K. H. Lee, S. P. Lim, P. Lu

Proc. ASME. IMECE2000, Dynamics, Acoustics and Simulations, 155-162, November 5–10, 2000

Paper No: IMECE2000-2194

DOI: https://doi.org/10.1115/IMECE2000-2194

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Topics: Microelectromechanical systems, Simulation, Computation, Degrees of freedom, Dynamics (Mechanics), Finite difference methods, Microbeams, Signals

Proceedings Papers

Nonlinear Vibration Analysis of a Fractional Viscoelastic Euler-Bernoulli Microbeam

Firooz Bakhtiari-Nejad, Ehsan Loghman, Mostafa Pirasteh

Proc. ASME. IMECE2018, Volume 11: Acoustics, Vibration, and Phononics, V011T01A017, November 9–15, 2018

Paper No: IMECE2018-87061

DOI: https://doi.org/10.1115/IMECE2018-87061

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Topics: Microbeams, Nonlinear vibration, Resonance, Differential equations, Excitation, Frequency response, Galerkin method, Partial differential equations, Strain gradient

Proceedings Papers

Static and Dynamic Amplification Using Strong Mechanical Coupling

Saad Ilyas, Nizar Jaber, Mohammad I. Younis

Proc. ASME. IMECE2016, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A026, November 11–17, 2016

Paper No: IMECE2016-66104

DOI: https://doi.org/10.1115/IMECE2016-66104

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Topics: Dynamics (Mechanics), Microbeams, Resonance, Sensors, Signal to noise ratio, Signals, Stress, Switches

Proceedings Papers

Nonlinear Structural Behavior of Double-Layers Based MEMS Actuator

Abdulrahman Al-oufi, Hassen M. Ouakad, Mohammad Tausiff Firaque

Proc. ASME. IMECE2016, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A016, November 11–17, 2016

Paper No: IMECE2016-66353

DOI: https://doi.org/10.1115/IMECE2016-66353

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Topics: Actuators, Microelectromechanical systems, Microbeams, Eigenvalues, Mode shapes, Modeling, Stress, Switches

Proceedings Papers

Static Response of Microbeams due to Capillary and Electrostatic Forces

Ahmad M. Bataineh, Hassen M. Ouakad, Mohammad I. Younis

Proc. ASME. IMECE2015, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A012, November 13–19, 2015

Paper No: IMECE2015-52037

DOI: https://doi.org/10.1115/IMECE2015-52037

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Topics: Microbeams, Electrodes, Stability, Fluids, Manufacturing, Switches, Water, Cantilevers, Chemical etching, Condensation

Proceedings Papers

Structural Behavior of Microbeams Actuated by Out-of-Plane Electrostatic Fringing-Fields

Hassen M. Ouakad

Proc. ASME. IMECE2013, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T11A014, November 15–21, 2013

Paper No: IMECE2013-65770

DOI: https://doi.org/10.1115/IMECE2013-65770

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Topics: Microbeams, Electrodes, Finite element methods, Microelectromechanical systems, Stress, Eigenvalues, Fittings, Gates (Closures), Microactuators

Proceedings Papers

Indenter Tip Dependence in the Determination of Elastic Modulus in Polymers

Seyed Hamid Reza Sanei, F. Alisafaei, Chung-Souk Han

Proc. ASME. IMECE2013, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T11A079, November 15–21, 2013

Paper No: IMECE2013-64831

DOI: https://doi.org/10.1115/IMECE2013-64831

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Topics: Elastic moduli, Polymers, Deformation, Plasma desorption mass spectrometry, Dislocations, Geometry, Mechanical properties, Mechanical testing, Metals, Microbeams

Proceedings Papers

Novel Low Cost Powerless MEMS Based Ossicular System

Adarsh Venkataraman Ganesan, Varun Das Ramanujam Ramdoss, Deepan Kishore Kumar, S. Swaminathan

Proc. ASME. IMECE2013, Volume 15: Safety, Reliability and Risk; Virtual Podium (Posters), V015T16A024, November 15–21, 2013

Paper No: IMECE2013-66341

DOI: https://doi.org/10.1115/IMECE2013-66341

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Topics: Microelectromechanical systems, Sound pressure, Acoustics, Actuators, Aircraft, Chain, Design, Displacement, Ear, Electricity (Physics)

Proceedings Papers

Static Pull-In Analysis of an Electrically Actuated Piezoelectric Viscoelastic Microbeam

Changping Chen, Shoujian Li, Liming Dai

Proc. ASME. IMECE2013, Volume 4B: Dynamics, Vibration and Control, V04BT04A016, November 15–21, 2013

Paper No: IMECE2013-63574

DOI: https://doi.org/10.1115/IMECE2013-63574

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Topics: Microbeams, Stress, Numerical analysis, Piezoelectricity

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NARROW

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

Blister-Like Local Buckling of Polysilicon Microbeams During Wet-Release

Low-Cycle Fatigue in Aluminum Microbeams

A Numerical Hybrid Finite Element Model for Lattice Structures Using 3D/Beam Elements

Investigations Into the Linear Coupling Between Symmetric and Anti-Symmetric Modes of V-Shaped MEMS Resonators Under Electrostatic Perturbation

Modal Interaction in a Levitation Force MEMS Based Resonator

Localized Deposition of Polysilicon for MEMS Post-Fabrication Processing

A Novel Testing Machine for Characterization of Materials for MEMS Applications

Low Temperature Eutectic Bonding for In-Plane Type Micro Thermoelectric Cooler

Pirani Pressure Sensor With Distributed Temperature Sensing

Novel Bulk Acoustic Wave Hammer to Determinate the Dynamic Response of Microstructures Using Pulsed Broad Bandwidth Ultrasonic Transducers

A Macromodel for Dynamic Simulation of Microelectromechanical Systems

Nonlinear Vibration Analysis of a Fractional Viscoelastic Euler-Bernoulli Microbeam

Static and Dynamic Amplification Using Strong Mechanical Coupling

Nonlinear Structural Behavior of Double-Layers Based MEMS Actuator

Static Response of Microbeams due to Capillary and Electrostatic Forces

Structural Behavior of Microbeams Actuated by Out-of-Plane Electrostatic Fringing-Fields

Indenter Tip Dependence in the Determination of Elastic Modulus in Polymers

Novel Low Cost Powerless MEMS Based Ossicular System

Static Pull-In Analysis of an Electrically Actuated Piezoelectric Viscoelastic Microbeam

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