Abstract

The design of the electrostatic moving wedge actuator for silicon microrelays was improved towards higher contact force and lower driving voltage. Additional degrees of freedom were included in the design, providing capabilities for tuning the switching characteristics according to the contact material requirements. The relationship of the new geometric parameters and the switching characteristics was determined by simulation. Optimized silicon microrelays exhibit contact forces up to 0.9 mN at nominal voltages of 12 V or 24 V. Further outstanding qualities are the high shock resistance and the nearly neglectable driving power. The commercial application of silicon microrelays will focus on small current applications.

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