Abstract

Thermally driven microactuators based on clamped-clamped beams have been successfully demonstrated. A theoretical model which includes both electrothermal and thermo-elastic responses of the micro beams has been established. These micro beams are made of heavily phosphorus doped polysilicon by a surface micromachining process. Theoretically, a 2 μm wide, 2.2 μm thick and 100 μm long beam can have a actuated displacement at the center point of about 2.7 μm under a 6 mA input current. The analytical results are consistent with experimental measurements which use computer image processing schemes to measure the lateral displacements.

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