This paper deals with superharmonic resonance of electrostatically actuated MEMS resonator sensors. The system consists of a MEMS cantilever on top of a parallel ground plate. An AC voltage of frequency near one fourth the natural frequency of the resonator provides the electrostatic force of actuation. The frequency response of the superharmonic resonance of the structure is investigated using two term Reduced Order Model (ROM) method.
Reduced Order Model of Frequency Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators
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Caruntu, DI, & Reyes, C. "Reduced Order Model of Frequency Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators." Proceedings of the ASME 2015 International Mechanical Engineering Congress and Exposition. Volume 4A: Dynamics, Vibration, and Control. Houston, Texas, USA. November 13–19, 2015. V04AT04A029. ASME. https://doi.org/10.1115/IMECE2015-50656
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