This paper presents our detailed design studies on capacitive micromachined ultrasound transducers (CMUTs) via finite element models developed in ANSYS 12. In this study, we will discuss our experimentally verified coupled field finite element simulations for operation frequency and bandwidth. The effects of device geometry, type of coupling media, material selection and properties are investigated for the frequency response, and bandwidth using an analytical approach. A commercial design of experiment software, Minitab is utilized for sample runs for obtaining response curves. The design principles for CMUTs are given in detail for effective and quick design. The design guidelines illustrate that, the frequency response is a strong function of transducer geometry, material selection and coupling media.

Volume Subject Area:
Nano and Micro Materials, Devices and Systems
Topics:
Design, Micromachining, Ultrasonic transducers, Frequency response, Geometry, Computer software, Engineering simulation, Finite element analysis, Finite element model, Simulation, Transducers
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Copyright © 2011
 by ASME
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